HRX-OM-W038 0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)
20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40
(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.
0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet
The set value can be copied to up to 10 switches simultaneously.
PA05 10 10 Electronic gear numerator *3. PA06 1 262144 (Position control mode) 5400 Electronic gear denominator *3.
Stroke+300 60 61 (Refer to 6) 170 18 11.5 45 10 4.5 9.4 T-slot dimension 110 (T-slot pitch) The drawing is an example of the left side mount type. 1) When the entire base of the electric actuator (X axis) must be supported, use dedicated T nuts provided by P/A.
Free Free E Free Pitch dimensions (without magnet) (mm) Bore Size E 4 6 8 10 10 13 13 13.5 Free Easy seal replacement With front boss (h9) Seals can be replaced easily by removing rod cover. Centering can be done easily. Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.
(Mounting hole for M5 thread) 2-4.2 Bracket 300 (For mounting) 68.4 78.4 58.4 68.4 40.5 45 45 37.4 28 4.5 1.6 41.6 22 50 9 134.9 60 (Piping port) Rc 1/4, 3/8 30.7 26.1 : With light/surge voltage suppressor PE 7 DIN terminal (D, Y) 1(P) 3(R) 3.5 Applicable cable O.D.
rise (C) 45 or less For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.
15 40.2 AS221F-U01-10 20.9 17 8.9 23.3 14.5 1/4 4 18.5 17.2 32.5 AS221F-U02-04 31.1 32 26.6 39.4 34.4 11 23.9 15.5 6 33.1 AS221F-U02-06 31.3 15.2 27.2 18.5 8 36.4 AS221F-U02-08 33.6 18.5 33.9 21 10 19 43.2 AS221F-U02-10 35.5 19 11 26.4 15.5 3/8 6 23 19.4 37.9 AS321F-U03-06 52.5 37.6 32.6 45 40 15.2 29.5 18.5 8 41 AS321F-U03-08 54.9 18.5 31.8 21 10 43.3 AS321F-U03-10 56.8 20.9 32.8 22 12
(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.
Weight kg Connection Filtration area cm 2 Rated flow rate L/min (ANR) Note) SFB100-02 SFB101-02 SFB102-02 SFB103-02 SFB104-M5 Rc 1/4 (Female thread) 0.15 NPT 1/4 (Female thread) ED301S-X10V (Including O-rings) 45 10 TSJ 1/4 0.16 UOJ 1/4 0.19 M5 (Female thread) 0.16 Note) Inlet pressure 0.7 MPa, at pressure drop 0.02 MPa 302 Clean Gas Strainer: Cartridge Type/Straight Type SFB200 Series HAA
4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.
30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53 11 18 depth 6 12.5 8.5 40 292.5 121 25 10 45 50 98 25 110 138 24 35 171.5 132 54.5 13 20 depth 6 12.5 10 P (Piping port) Model Stroke R S T V W WB XA XB Y 30 U 5.5 Model Nil TN TF RS2H50 RS2H63 RS2H80 40 21 2 15.5 73 32 5 15.8 10 24 RS2H50 RS2H63 RS2H80 NPT1/8 G1/8 Rc1/8 30 47 24.5 3.5 6.4 16 87.5 38.5 5 18.7 10 24 Rc1/4 NPT1/4 G1/
HOW 10 (1 1/4B) 12 (1 1/2B) 16 (2B) 45 20 (2 1/2B) 24 (3B) Fixed Note) Refer to page 509 for the T dimension. Replacement Element Part No.
or less Metal seal 32.4 (1.8) VQ43 0 0.28 (0.34) Closed center VQ4000 52 or less 50 or less Rubber seal 36.0 (2.0) VQ43 1 47 or less 45 or less Metal seal 36.0 (2.0) VQ44 0 0.28 (0.34) Exhaust center 52 or less 50 or less Rubber seal 39.6 (2.2) VQ44 1 47 or less 45 or less Metal seal 36.0 (2.0) VQ45 0 Pressure center 0.28 (0.34) 52 or less 50 or less Rubber seal 39.6 (2.2) VQ45 1 0 5 0 5
Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.
Dual 3-port valve S07 A B C6 0.58 0.39 0.16 0.67 0.37 0.18 25 or less 49 2-position Single S0712 0.51 0.40 0.15 0.64 0.33 0.15 22 or less 34 Double S0722 0.51 0.40 0.15 0.64 0.33 0.15 10 or less 42 Manifold 3-pos. Bar Base 3-position closed center S0732 0.54 0.37 0.10 0.46 0.38 0.08 45 or less 42 Page 745 4-pos.
DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.