Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Bottom Mounting Style, Bore Size: 32mm, Port Thread: Rc, Stroke: 50mm, Rod End Thread: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Slide Bearing, Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 32mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specifications: Vacuum Suction Type, Magnet: w/Auto Switch, Built-in Magnet, Mounting: Basic Style, Bore: 25mm, Port Thread: Rc, Stroke: 50mm, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Basic Style, Cushion: Rubber Bumper, Bore Size: 40mm, Stroke: 50mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Basic Style, Cushion: Rubber Bumper, Bore Size: 20mm, Stroke: 50mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Specification: 11 (Clean Series, Vacuum Suction), Bearing: M (Slide Bearing), Bore Size: 6mm, Stroke: 50mm

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Two Hand Control Valve

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Compact and

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Fluid Compatibility Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone Hydrogen peroxide Concentration 50% or less 50C or less Ethyl acetate Butyl acetate Nitric acid (except fuming nitric acid) Concentration 10% or less Deionized water Sodium hydroxide Ultra deionized water Toluene Hydrofluoric acid Concentration 50% or less Sulfuric acid

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

x 1.25 57 59 8 tube 20 to 50 6 tube M8 x 1.25 8 tube Ball joint rotation 15 Pad Types Pad type Ball joint Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 Material Urethane rubber Fluoro rubber Black with green mark Conductive NBR Black with 1 white mark Conductive silicon rubber Black with 2 white marks 50 NBR Silicon rubber White Brown Black Colour Durometer Note 40 60 60 50 50 Note:

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Description Material 1 Bracket Steel strip 2 Cross recessed round head screw Steel wire 3 Clasp Steel strip 8 Cassette 9 Seal NBR 10 O-ring NBR 11 O-ring NBR 12 Bonnet A POM 13 Bonnet B POM 14 Gear PPS 15 Indicator gear POM 16 Clip Stainless steel 1 The AS3002FS-11, AS4002FS-11, AS4002FS-13 are made of stainless steel. 9 Related Equipment Holder for Speed Controller TMH Series Specifications

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

43.6 44.6 23.5 24.2 25.2 32.6 33.7 35.2 32.6 38.3 39.1 40.6 41.8 51.1 52.1 20.7 21.4 23.5 24.2 6 7 8 12 13 22 25 36 40 44 48 85 89 6 7 12 9 12 18 16 24 22 25 36 40 52 93 106 38 39.2 40.7 40.7 44.8 53.2 59.8 59 64.4 71.6 76 77.7 82.1 4.5 5.2 6.2 5.2 6.3 6.7 8.1 7.4 8.2 9.8 11 38 39.2 48.7 40.7 40.7 50 52.2 52.2 54.4 59.8 59 64.4 70.8 76.9 83.1 8.4 9.3 11.6 9.3 11.6 12.8 15.2 12.8 15.2 18.5