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100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

This can be prevented by inserting a noise filter, such as a line noise filter and ferrite core, between the switchmode power supply and the product, or by using a series power supply instead of a switch-mode power supply.

(mm) A B C D E F G H J L Port size Bracket part no.

YES NO NO 14.5m T YES YES NO NO YES YES (C EU 1 C EU 5) NO YES A 12 A NO YES NO YES NO NO YES () () NO YES YES NO YES NO 5m m+ 5m m+ YES 3 0m m 3 0mm NO YES NO NO YES NO YES YES C EU 2 13 4 4-1 40 50 63 80 100 1.5MPa 1Mpa 0.5MPa 0.1Mpa 0.3MPa 50~500mm/s 1 060 7-500mm 6H 250mm 2511000mm 1 4-2. 7.6 20.5m <> 14.5mT DC10.8V26.4V1% 50mAMax. 0.1mm/

Use this as a standard when mounting, etc. Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

Use this as a standard when mounting, etc. Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

SUP/EXH block Note 1) SSQ1000-PR-3-C8-(S) Back pressure check valve Note 2) SSQ1000-BP SUP block plate SSQ1000-B-P EXH block plate SSQ1000-B-R Port plug Note 3) P R A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B Note 4) C3 (N1) With 3.2 (1/8") One-touch fitting C4 (N3) With 4 (5/32") One-touch fitting C6 (N7) With 6 (1/4") One-touch fitting

Apparent power (VA) 50/60 Hz VXA Holding VCS2: 10/8, VCS3: 15/13, VCS4: 19/16 Note 1) For low pressure steam at a temperature of 120C or less, use FKM for the seal material.

Reset (RES) Keeping RY(n 1)A or RY(n 3)A (RES) ON for 50ms or longer RY(n 1)A RY(n 3)A 1 allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A (RES). (Refer to section 10.4.1.) If RY(n 1)A or RY(n 3)A (RES) is turned ON with no alarm occurring, the base circuit will not be shut off.

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

[F 4] <> [F 4] [F 4] (34) -33No.PS-OMS0006CN-G () OUT1 [AP1 REdY] (OUT1[AP1 REdY] 1 ) OUT1 OUT1 OUT1 [AP1 RUn] (A2L RUn 1 ) , P_1=A-(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= 1 -34No.PS-OMS0006CN-G [F 6] 5R.D. <> [F 6] [F 6] -35No.PS-OMS0006CN-G [F10] <> [F10] OFF 2 OUT1 [dUAL]2 [dUAL]2 () () 37 () () () 37 () [F10] -36No.PS-OMS0006CN-G <> (OFF) [

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

Do not use a load that generates surge voltage. If a surge voltage is generated, the discharge occurs at the contact, possibly resulting in the shortening of product life. If driving a load such as a relay that generates a surge voltage, use an auto switch with built-in contact protection circuit or use a contact protection box. 3.

D Can be used for a wide range of pressures from a low vacuum up to a pressure of 1.0 MPa The use of a special profile ensures sealing and reduces resistance when the tube is inserted.

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.

(EA)5 1 (P) 3(EB) u i 3 position pressure center 3 (EB) 2 (B) 1 (P) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) (Drawing shows a closed center type.)

/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F (ZS-33-D) (ZS-33-F) -68No.PF-OMP0001CN-F Revision history A B C D E F [September 2016] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

/4.9 (2) A AC200V 50/60Hz 1.7/1.7 3.5/3.2 3.6/3.4 AC100V,AC200V 50/60Hz 250/290 425/470 460/530 (2) W (3) AC100V 10A AC200V 5A 10A R134a(HFC) AC100V/200V g 2805 2905 35010 Rc3/4 Rc1 10mm 1 2 kg 44 47 71 kW 7.5 11 15 1ANR 2065% 2 3 30mA 4() IDU Series 6-1 6 1 IDX-OM-W023 6 IDU8E-23 IDU11E-23 IDU15E1-23 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.