Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Safety Instructions

In accordance with the dissolution method, carry out the quantitative study of fluorine ions. 0.4 0.2 0.0 Metal ion elution (ng/cm2) Note 4) 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Kind Al Fe Ni Na Ca Operating temperature (C) Amount of elution 0.1 or less 0.1 or less 0.1 or less 0.1 0.1 or less Clean the inside of fluoropolymer tube with ultrapure water.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Nil Without auto switch B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis T Center trunnion * For applicable auto switches, refer to the table below.

MLGP

Dimension C is 77 mm.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

-XA< Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel -XC7 (mm) Standard stroke Bore size Long stroke (L and F only) -XC8 -XC14 -XC15 -XC30 Adjustable stroke cylinder/Adjustable extension type 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Change of trunnion bracket mounting position Change of tie-rod length Rod trunnion 40 800 25, 50, 75, 100, 125, 150

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

Bore size (mm) Standard stroke (mm) Note 1) Long stroke (mm) Note 2) Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at stroke end) and mounting height Operating range Auto switch mounting bracket/Part no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600

MQQ

Foot, Flange Body mounting bolts Double clevis Clevis pin, C type retaining ring for shaft, Body mounting bolts 1172

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Made to Order (For details, refer to pages 1420 and 1470.)

Stainless Steel 316 Fittings

During regular maintenance, check for the following and replace any components as necessary. a) Scratches, gouges, abrasion, corrosion b) Leakage c) Flattening or distortion of the tube d) Hardening, deterioration or softness of the tube e) Loosening of the union nut 3.

44

During regular maintenance, check for the following and replace any components as necessary. a) Scratches, gouges, abrasion, corrosion b) Leakage c) Flattening or distortion of the tube d) Hardening, deterioration or softness of the tube e) Loosening of the union nut KM KF M H/DL L/LL 3. Do not repair the fittings or patch the tube for reuse. KC 4.

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

For the CM2B32-25+OOFXC11, A = 25 mm, B = 75 mm, and the full stroke = 75 mm.

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

Thermo-chiller/Rack Mount Type

Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

energy saving effect

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Vacuum gripper

TQ1230001-OM104-C

HRS100/150

V : 150 [L] Cooled substance specific heat C : 1.0 x 103 [cal/(kgfC)] HRS 100/150 HRS 100/150 HRSH 090 HRSH Cooled substance temperature when cooling begins T0 : 30 [C] Cooled substance temperature after t hour Tt : 20 [C] Cooling temperature difference iT : 10 [C] (= T0 Tt) Cooling time it : 15 [min] Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 75 Standard Motor Vertical Mount Motor Output Ground Ball Screw 100 W 10 mm/6 mm lead Series LTF6 How to Order 300 LTF6 R R 2 A1 K PF S2 Photo micro switch Nil Without switch/mounting rail 1 2 3 4 5 6 NPN 1pc. NPN 2pcs. NPN 3pcs. IO connector Motor type Stroke (mm) Refer to the standard stroke. S2 S6 Nil None AC servo motor (Incremental encoder) 100 W PNP 1pc.