HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

CEx-OMQ0010

200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES YES NO NO 14.5m T YES YES NO NO YES YES (C EU 1 C EU 5) NO YES A 12 A NO YES NO YES NO NO YES () () NO YES YES NO YES NO 5m m+ 5m m+ YES 3 0m m 3 0mm NO YES NO NO YES NO YES YES C EU 2 13 4 4-1 40 50 63 80 100 1.5MPa

CEx-OMQ0011

c. d. - 3. 3. 3. 3. 1. 1. 1. 1. a.560 b.2585%RH c. d. e.

AY Series

XRAY-1250-100 XRAY-1250-100-POB XRAY-1250-200 XRAY-1250-200-POB Tandem XRAY1250-200 x-KIT-1250-100-COV XRAY-1250-100 x-KIT-1250-200-COV XRAY-1250-200 To Mount 6.5mm Prox. X-KIT-1250.I2MM To Mount 12mm Prox. X-KIT-1250-t8MM To Mount 1Smm Prox. The right to chnge designs and specifications without trolice is rcserved. All dat!

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Digital Flow Switches

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

VT317

VQ VKF Surge voltage suppressor mounting part (For G) VQZ VZ VS VFN Surge voltage suppressor Electrical entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire C Conduit JIS Symbol T Conduit terminal D DIN terminal Rated voltage 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 50 60 50 60 4 50 60 5 6 24 VDC 12 VDC 7 240 VAC, Hz 50 60 9 Other Option Manifold Accessory

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

Compact Vacuum Ejector Series ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Free Mount Cylinder

) 51 (61) 55 (65) 59 (69) 63 (73) -XC34 C(D)UK10-D 60 (85) 66 (96) 72 (102) 78 (108) 84 (114) 90 (120) C(D)UK16-D 113 (147) 124 (164) 136 (176) 148 (188) 160 (200) 172 (211) 195 (235) 219 (260) C(D)UK20-D Precautions 212 (266) 229 (288) 246 (305) 263 (322) 280 (339) 297 (356) 335 (390) 370 (424) C(D)UK25-D Be sure to read before handling.

2–4

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F7 F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mouinting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 D-F7LF 8 7 8 D-F9V D-F9W, D-F9WV D-F9BAL Switch mounting bracket Switch

Round Type Hydraulic Cylinder

Mounting correctly Mounting incorrectly Solid state D-G59, D-G5P, D-K59, D-G5BA D-G59W, D-G5PW, D-K59W D-G59F, D-G5NT, D-G5NB Solid state D-H7A1, D-H7A2, D-H7B, D-H7BA D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW Reed D-C73, D-C76, D-C80, D-C73C, D-C80C Reed D-B53, D-B54, D-B64, D-B59W Auto switch Auto switch Auto switch mounting screw M3 x 0.5

VQ5000

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

JIS symbol Auto switch model D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 25 to 1000 25 to 1000 25 to 1300 25 to 1500

ZP

A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPR Replacement Parts

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214