Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Plug-in/Plug Lead: Single Unit

VQ0 55.5 M5 ground screw VQ4 34.5 U side n VQ5 12 X VQZ B 2 A 4 6 B A VQD B 2 A 4 SMC SMC SMC SMC SMC 5 B A A 4 B 2 4 B A L2 L1 A 4 B 2 3 B A A 4 B 2 2 B A P = 41 58.5 34.5 48 P = 41 A 4 B 1 B A 2 68.5 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n 9 445 465 8 404

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

Clean Room Rodless Cylinder Series CYP ø15, ø32

M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

VQC

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP 1 X 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

CHKD/CHKG

D C D D CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L x 185L x 210L CQ-M8 x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 145L x 170L x 195L x 220L x 245L C Model Mounting bolt

Modular F.R.L. Units

Z 6 6 7 7 7 Y 17.5 17.5 22.5 26 26 W 36.5 36.5 45.5 52.5 52.5 V 27.3 30.3 32.5 38.4 39.9 U 2.3 2.3 2.3 2.3 2.3 H H 37.5 37.5 37.5 42.5 42.5 J 59.5 59.5 66 72 72 S 15.4 15.4 24 26.5 26.5 J 22 22 28.5 34.5 34.5 J 58.5 58.5 65 72 72 R 5.4 5.4 6.5 8.5 8.5 F M36 x 1.5 M36 x 1.5 M45 x 1.5 M52 x 1.5 M52 x 1.5 Q 43.9 44.3 46 54 55.5 D 22 22 28.5 34.5 34.5 N 34 34 36 38 38 A 40 53 53 70 75 C 23.5

Secondary Batteries

How to Order 90 For Compact Cylinders J B 40 8-125 Thread nominal size Series compatible with secondary batteries Nominal thread size Applicable cylinder nominal thread size 90 Material restriction 13-050 14-070 15-080 16-100 18-125 10-150 16-200 20-250 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 For compact cylinders/Female thread Applicable bore size (mm) Symbol

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

S070

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 7 Series S070 3 Port Solenoid Valve

S070

lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 mounting hole 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1

CE

x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.