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IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

Additionally, do not mount the foot bracket with the pressure applied to the port. y 0 A port B port a 1 w y y a e k w of y e e k g n of ra n e io at g ot R n R +4 0 ra ot n io 0 at at ot 8 R io 1 R +4 0 n y ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e of k 189

HRX-OM-R026-R Operation Manual InstallationOperation Original Instructions Thermo chiller HRSH090 Series HRSH090-A-20HRSH090-A-40HRSH090-W-20HRSH090-W-40HRSH090-A-20--S HRSH090-W-20--S Keep this manual available whenever necessary 2022 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product).

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

Positive pressure ISE2 ZSE2 Vacuum Piping specifications Wiring specifications Single mounting R 1/8 Note 2) Grommet type (Lead wire: 0.6 m) 01 Nil Single mounting NPTF 1/8 Note 2) Grommet type (Lead wire: 3 m) T1 L Connector type (Lead wire: 0.6 m) 0X C W/suction filter (Mounting on ZX unit) M5 x 0.8 Connector type (Lead wire: 3 m) W/suction filter (Mounting on ZX unit) M6 x 1 (Option) 0XY

Note 6) Ground fault circuit interrupter is not mounted in product other than option "R". 6 1 6.

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Thereafter F1 = F2: See figure w. 4 (A) 1 (P) 2 (B) 3 (R2) Inw, port 3(R) is half open. 705 Series VER2000/V4000 How to Find the Flow Rate Air temperature of 20C CurrentPressure Characteristics Selecting Electro-pneumatic Proportional Valve The response behavior of an electro-pneumatic proportional valve is affected by the load capacity.

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Allowable kinetic energy (J) JMB Male rod end R: 0.35 H: 0.42 R: 0.56 H: 0.65 0.91 1.80 3.40 4.90 11.80 16.70 Symbol Specications -X446 PTFE grease Air cushion MB Female rod end 0.11 0.18 0.29 0.52 0.91 1.54 2.71 4.54 Made to Order (For details, refer to pages 1703 to 1896.)

Hydraulic Fluid Compatibility Standard Strokes Hydraulic fluid Compatibility Bore size (mm) 20 25 32 40 Standard stroke (mm) Compatible Standard mineral hydraulic fluid Compatible W/O hydraulic fluid 25 to 800 Compatible O/W hydraulic fluid Not compatible Water/Glycol hydraulic fluid Not compatible Phosphate hydraulic fluid Orders of the standard strokes above can be supplied with a minimum

(Use an auto switch rated 24V DC, with a minimum amperage capacity of 10mA.) q q q w w w e e e r (Unit: N) Bore size (mm) 40 50 63 80 100 Operation r Min. sensing weight 26 40 62 100 160 Warning Back-up of the balance pressure data The balance pressure data is backed up by the controller for approximately 5 minutes during a power outage or when the power supply has been turned OFF.

When the inlet pressure is 0.4 MPa: 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 8 Series VBA Construction/Replacement Parts VBA10A VBA11A q r e w t r e u q t w VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q t y r w e q VBA22A, 42A Replacement Parts/Kit No.

VCB F N G Coil type NPT G Grommet / Tape winding W Grommet / Molded VCL Port size VCS Port size Symbol Series 20 p p 30 10 p VCW M5 01 02 p p M5 1/8 (6A) 1/4 (8A) Magnet wire protection: Tape winding Magnet wire protection: Resin Molded Orifice diameter F Faston terminal / Molded Orifice diameter (mm ) Symbol Series 1 2 1 2 3 2 3 4 1 10 1.6 1.6 2.3 20 3.2 2 Magnet wire protection:

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Lateral Mounting (Through Holes) Lateral Mounting (Tapped Holes) l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Max. fastening torque in lb (N m) Bolts M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 22 (25) 45

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Dimensions Type R Installation type 372 4 x M5 mounting hole 342 58 34 12 6 72 50 149 2 492 Type J Handy type LQ-GJ 36 76 117 30 49 127 37.5 43 63 Type K Handy type 45 LQ-GK 36 SET POS.

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.