C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

center line NX X 4 x 2square nut J NH NT LB NW PB PI NV LW T-slot for body mounting NC GB LE H7 depth R Cushion needle 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 1 XX SS NE PP QQ RR SS H SMC TT UU VV UU PH A G RW T-slot for body mounting N Z + stroke J M4 x 0.7 M6 x 1 M8 x 1.25 MM M5 x 0.8 M8 x 1.25 M10 x 1.5 Model MY2HT16G

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

R.

Electric Slide Table / High Precision Type 《 AC servo motor 》

rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308 197 385 Power consumption [W] at 20C *9 6.3 7.9

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

(p.4.6-4 through p.4.6-5) w e Tempered glass Sight glass AM850 is aluminum cast. Replacement Parts AM450 Part No. No. Description Material AM150 AM250 AM350 AM550 AM650 AM850 Glass fiber NBR Element assembly AM-EL150 AM-EL250 AM-EL350 AM-EL550 AM-EL650 AM-EL850 AM-EL450 r With gasket and O ring Max. Flow Max.

Cylinder with Lock Series CLS

141 459 495 Packed with clevis pin, flat washer and cotter pin. 10 Series CLS Dimensions Center trunnion type/(T) BC CLS125 MODEL SMC FREE LOCK CHECK Cylinder With$ Locking Mechanism 5 30 Rc(PT) 1/4 Unlocking port (unlocked when pressurized) Z + 1/2 stroke Plug with breathing hole GC BB BA GA GA 2-Rc(PT) P 4-J Width across flats KA M MM BZ GB R TY TDe8 90 59 D W 14 AL C A K 43 N N TT B

Multistage Ejector Series ZL112/212 1

Front cover A w !0 Misc.

44

Swivel Elbow KFG2V Metric Inch P. 324 P. 329 Metric Inch P. 325 P. 331 KDM KB KR KA KQG2 Straight Union KFG2H Female Connector KFG2F KG Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 KFG2 KFG2 MS KKA KP LQ Union Tee KFG2T Union Nut KFG2N MQR Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 T IDK 321 Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread

3M/SMseries

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

R.

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: ø4 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -