Stations: 08 (8 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters VACUUM PAD, ZP, ZP2, ZP3. VACUUM PAD BELLOWS WITH BUFFER. 4.85000 lb. M30.

Stations: 08 (8 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 08 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters VACUUM PAD, ZP, ZP2, ZP3. VACUUM PAD W/ ADAPTER. 25.30000 lb. M30.

Stations: 08 (8 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: 1T (Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None; Temp.: Analog 1 to 5 V; Temperature Sensor: Yes)

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dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

Shock Absorbers and Rate Controls

N/A 6. +0. 6. +0.t3/0 6.02 38.1 6.0 8.3 5.9 t0.0 861 .S !

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

SMC Electronic Switch Series Variations

ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

RS2H-OM0045P

P.8 3-1. 3-2. 3-3. 3-4. 3-5. 3-6. 3-7. 4. P.12 5. P.12 6. P.13 6-1. 6-2. 6-3. 6-3-1. 6-3-2. 6-3-3. 6-3-4. 6-4. 6-4-1. 6-4-2. 7. P.17 7-1. 7-2. 7-3. 7-3-1.D-M9/A9 7-3-2.D-P3DW 8. P.20 8-1. 8-2. 9. P.21 10. P.22 -1- RS2H (ISO/IEC) (JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

Series KDM Rectangular Multi-connector

Other tube sizes Tube size Number of (O.D.) connection Part No. 10 6 IN-254-52 12 6 IN-254-53 68

ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 13-9-9 10 Series ZQ Manifold Exploded View 6 3 6 4 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

3 Port Solenoid Valve Series VQ100 1

Flow Rate SOL. 17 17 stations For obtaining the flow rate, refer to page 4-1-6.

Gun Type Ionizer

Flow setting: 7 300 250 200 Flow setting: 6 150 Flow setting: 4 100 Flow setting: 0 Flow setting: 2 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Pressure [MPa] How to measure Pressure measurement Air supply measurement Connecting tube: O.D. 8 x I.D. 5, 50 mm 184 Gun Type Ionizer IZG10 Series RoHS How to Order IZG10 08 01 01 AC adapter*1, Power supply cable One-touch fitting Nozzle type Symbol Port size