HRX-OM-W060

to 3 .5-57 Setting of contact output signal 4 to 6 .5-57 5.4.11 Temperature waveform screen.5-62 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting . 6-2 6.4 Other Errors . 6-5 Chapter 7 Control, Inspection and Cleaning . 7-1

Cylinder with Lock

8)*1 65 + 30 (n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)*1 95 + 100 (n 2) (n = 2, 4, 6, 8)*1 100 + 100 (n 2) (n = 2, 4, 6, 8)*1 105 + 100 (n 2) (n = 2, 4, 6, 8)*1 110 + 100 (n 2) (n = 2, 4, 6, 8)*1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

H I J K L 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4 ( 0 3 . 6 1 ) 8 2 4 ( 5 8 . 6 1 S I 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4 ( 0 3 . 6 1 ) 8 2 4

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

HRX-OM-R005

Measures . 1-6 1.5.1 Safety Instructions for Use . 1-6 1.5.2 Personal Protective Equipment . 1-7 1.6 Emergency Measures. 1-8 1.7 Waste disposal . 1-9 1.7.1 Disposal of refrigerant and compressor oil. 1-9 1.7.2 Disposal of product . 1-9 1.8 Material Safety Data Sheet (MSDS) . 1-9 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2

T

Color Color Page Page M Metric size (mm) Inch size (inch) Metric size (mm) Inch size (inch) 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 " (3.2) " (3.2) 6 10 12 16 6 10 12 16 General tubing 1.5 MPa max. at 20C Use in spatter generating atmosphere flame resistant material H Black Black 15-6-10 Nylon Tubing Series T White

Air Cylinder CP Series Cylinder Positioner Assembly

14) (401 402 (1021 1.07 (73) 0.98 t25l 205 (52) t.55 (14) 0.83 121\ 1 4 3 t 1 1 ) M22x1 5 1.46 (37) 457 ( 1 1 6 1 1.73t 6 3 i16t 0.53 113.5) 2 5 6 t65l 8 0 3 1204\ 2.80 (71) 9.72 1247\ 2 5 6 t65l 0.49 '12.5\ 3 . 1 5 l80J 10.08 (256) l40l 457 a 1 t 6 ) 3.62 192) 0.98 /30) 2.05 (52) 0.55 (14) 0.83 t21) Ml2x1 75 1 4 3 ( 1 1 ) M26x1.5 1 5 7 (40) 4 9 6 (126) 1.69 i43l t.67 (1?

ISA2

to 6 stations Rc, NPT, G 1/8 IP66 (IP65 for solenoid valve.

CUJ

Table 1 Standard strokes Lead wire length (m) Applicable load Auto switch part number Electrical entry direction Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Action Load voltage Electrical entry Indicator light Wiring (output) Special function Double acting Type 0.5 (Nil) 3 (L) 5 (Z) DC AC In-line Perpendicular

5 Port Air Operated Valve Series SYA3000/5000/7000 1

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

IDX-OM-W032

1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4

IDX-OM-W017

3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 IDFA Series 1 6-3 . 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

IDX-OM-W026

-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5-1 . 5-1 5-2 . 5-3 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 1 6-5 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 .

0.01

9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) Prefix the part number of the air

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5