SMC Corporation of America
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P S I : 0 . 1 N d r a ' . k P a : 1 Ambient and lluid temoeralure 0 to 50'C {with no condensation) Enclosure tP65 Hated pressure I Weight tw10trn ADorox. 250 a {without options) tw20t Aoorox. 350 q (without options) tws0 Aoprox. 645 q (without options) R = ='5 Note 1) Please refer to graph 1, relation lo lhe ditferences belween lhe sel pressure and input.

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -92No.PF-OMX0002-B Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Bit offset Item Notes 0 Accumulated flow SW1 0: OFF 1: ON 1 Accumulated flow SW2 0: OFF 1: ON 2 Flow rate SW1 0: OFF 1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis

common) D-F8N/F8P/F8B D-M9N/M9P/M9B When detecting extended stroke end When detecting retracted stroke end 10 mm or more 10 mm or more (2) 1 1 3 7 Stroke 3 + Stroke 7 CUJ CU CQS Note 1) Solid state switch: D-M9 includes one auto switch.

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

Cooling capacity . 9-7 9.5 Heating capacity . 9-7 9.6 Pump capacity. 9-8 9.7 Compliance . 9-9 9.8 Sample DoC. . 9-10 9.9 Daily Check Sheet . 9-11 Chapter 10 Product Warranty . 10-1 HRS-R Series HRX-OM-X027 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before using the product be sure to read and understand all the important actions highlighted in this manual. 1.1 Before using

x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1

1 i !3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

1 n 9 9 9 9 n 9 9 MHR d u d u r u a a a r u o 9 9 9 s o s F tr F ie tr ie r r r 1 1 1 D r D r d d d e e e e v v s s o o i i g n g n n n n n a a H H Rotary Gripper MRHQ 10/16/20/25 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com n P n P g g r r o o i i s s d d

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

M5, M6 Soft nylon Polyurethane KAH23-M5 17 8.5 14 13 2.1 M5 0.8 M6 1.0 7 17.5 12.5 8.5 3.4 2.9 4 3.2 1 8 KAH23-M6 KAH23-U01 8 10 KAH04-M5 M5 0.8 M6 1.0 17 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 18.5 13.5 5 14 10 16 10 5.6 5.6 1 4 KAH04-U02 16.5 10.5 10 Uni thread KAH06-M5 M5 0.8 M6 1.0 18.5 15 14 3 11.5 4 4 10 KAH06-M6 19 1 8 KAH06-U01 14.5 5 12 6 19.5 17 1 4 KAH06-U02 13 17 14 12

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

A 1 1000 Metric 6 7 2 2000 Inch 1/4" 10 3 3000 Elbow (mm) Applicable tube O.D.

VV4Z1-20-1 Model P(SUP)/R(EXH) Common SUP/Common EXH Valve stations 2 to 20 stations (1) A port Porting specifications Location Direction 1(P), 3(R) port 2(A) port Valve Top M5 x 0.8 Rc 1 8 Port size M5 x 0.8 Note 1) If there are more than 10 stations, exhaust from both sides of manifold.

14 12.8 KAY06-U01 10 10 6 1 4 20 10 KAY06-U02 13.4 13.4 16 38 25 17 12 1 8 1 4 22.5 24.5 KAY08-U01 KAY08-U02 14 18 41.5 14 15.2 12 8 23 18.5 17.7 17.7 3 8 25.5 42.5 KAY08-U03 17 27 1 8 KAY10-U01 46.5 27 26.5 25 31 27 30 1 4 3 8 47.5 48 17 KAY10-U02 KAY10-U03 26.5 18.5 17 10 21 28.4 28.4 1 2 KAY10-U04 30 49 51 31 35 22 1 4 3 8 27 28 49.5 50.5 KAY12-U02 KAY12-U03

Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors. 11-5-5 5 Series MSUA Specifications Model 2 MSUA3 MSUA7 MSUA20 MSUA1 Single vane Vane type Single vane Single vane Single vane Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) Ambient and fluid temperature 5 to 60C 0.15 to 1.0 Operating

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Parts list No. Description Parts list No.

1.1.1 SAFETY TRAINING -1-1 1.1.2 IDENTIFICATION OF DANGER, WARNING, CAUTION AND NOTE -1-1 1.2 WARNING LABEL AND CAUTION LABEL -1-3 1.2.1 THE POSITION OF ATTACHED WARNING LABEL AND CAUTION LABEL -1-3 1.3 PRECAUTIONS FOR RUNNING -1-4 1.3.1 FOR SAFETY -1-4 1.3.2 SAFETY INTERLOCK -1-5 2 CAUTION ON INSTALLATION -2-1 2.1 ENVIRONMENT -2-1 2.2 INSTALLATION -2-2 2.3 MOUNTING -2-3 2.4 PIPING -2-4 2.5