CU

Lead wire length (m) Load voltage Auto switch part no.

HEC-OM-S008

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

70pvvna

In this case, pilot solenoid valve is VO307-DZ. 17-4-6 3 Series VNA Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control Model Flow characteristics Measured by air Measured by water Note) Weight (kg) Orifice size (mm) Air operated Model Port size Rc Cv Av x 10-5 m2 b External pilot solenoid C [dm3/ (barsec) ] VNA1-6A VNA1-8A 1 8 1 4 10 0.88 1.5 1.9 3.8 4.8 7.5 25

High Speed Pilot Operated

Order no. 1.5 m SAC-3P-1,5-PUR/M 8FR 1669738 3 m SAC-3P-3,0-PUR/M 8FR 1669741 5 m SAC-3P-5,0-PUR/M 8FR 1669631 10 m SAC-3P-10,0-PUR/M 8FR 1694169 Solenoid valve side pin wiring diagram 1 (+, ) Energy saving IC 3 (, +) Diode 3 (, +) 1 (+, ) LED Coil There is no grounding for this product.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) M-5ALN-4 M-5ALU-3, -4 C D M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 1.4 2.4 1.1 1.4 2.4 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M-5ALN-6 M-5ALU-6 Barb elbow for nylon tube: M-5ALHN-4, -6 Barb elbow for soft tube: M-5ALHU-3, -4, -6 C D Part No.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Suction flow rate L/min (ANR) Size 10/16 20/25 10 to 60C 0.01 180 c.p.m.

PSxx-OMF0005CN

-2No.PS-OMF0005CN-E / 1 1.5 *3) 1 1 [] -3No.PS-OMF0005CN-E () () -4No.PS-OMF0005CN-E () * 5 m -5No.PS-OMF0005CN-E * (RcNPTG) 1/8 79 Nm 1/4 1214 Nm 1.52 2 * () ()() () () -6No.PS-OMF0005CN-E * IP66IP65 () 060 (5 ) * -7No.PS-OMF0005CN-E (ISA2 ) * * (EXH) 5 m 0.2 MPa CE (2 VCA ) () C-R () ()C-R ( ) () AC 10 DC 2 * * 2 0.51.25 mm -10+10 5 -8No.PS-OMF0005CN-E *

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

-mGm-m VX VNl VQ Dotted line: Bracket mounting style (-F) 4.3-9 Series VQ20/30 Dimensions/Series VQ30 DIN connector (Y) VQ31A1-mYmm-m Dotted line: Bracket mounting style (-F) 4.3-10 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve How to Order Manifold VV2Q 2 2 08 How to Order Manifold Assembly List valve and option part numbers under the manifold base part number.

Air Cylinder Series MB

Bore size (mm) Part No. l Dd9 L m d H B C D Applicable cotter pin 3 X 18 l 4 X 25 l 4 X 35 l 4 X 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03 CD-M05 CD-M08 IY-12 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 10 14 22 25 36 51 72 44 60 82 4 4.5 5 5 3 4 4 4 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 6 8 11 13 16 16 17

5 Port Solenoid Valve Series SQ1000/2000

B Note 2) Note 1) Except double (latching) C Note 2) Note 1) The function symbol is D for double solenoid specifications.

Angle Seat Valve /

Fluid and Ambient Temperatures Valve Leakage Rate Internal Leakage Fluid Seal material Leakage rate *1 Fluid temperature [C] Ambient temperature [C] Steam, Air FKM 10 cm3/min or less *2 Steam: 183 or less Water, Air: 99 or less 20 to 60 Water 1 cm3/min or less * No freezing External Leakage Fluid Seal material Leakage rate *1 Steam, Air FKM 10 cm3/min or less *2 Water 1 cm3/min or less *1

MRQB-OM0002

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Ejector Valve Unit, Series ZYY/ZYX

MN MO Grommet L type plug connector Max. vacuum pressure -84kPa {-630mmHg} -53kPa {-400mmHg} S L M type plug connector Nozzle diameter 07 10 0.7mm 1.0mm Note 1) Types LN and MN are equipped with sockets (2pcs.).

With Factory Installed

(-R) specification Bracket mounting dimensions With auto drain Model Port size A B C 0 E F G I H J K L M N P Q S Float type N.O N.C B B AW3001 1/4 . 3/8 53 2 11 92.5 55 38.5 41 40 46 6.5 8.0 53 2.3 42.5 56 4 32.5 236.5 247 10 AW4001 1/43/8 V2 70 262.5 112 70 38 50 54 54 8.5 10.5 70 2.3 52.5 73 1 36 288 298.5 SMC'S GLOBAL MANUFACTURING DISTRIBUTION, AND SERVICE NETWORKe EUROPE -ASIA -NORTH