0.4

Note 2) Special wiring specifications are available as semi-standard to increase the maximum number of stations. 557 VQC Series S VQC1000 Series Kit (Serial transmission) For EX500 Gateway Decentralized System 2 (128 points) IP67 compliant VV5QC11 S kit (Serial transmission kit: EX500) L2 L1 42.5 (Pitch) P = 10.5 28 1.5 4 x M4 Mounting hole Indicator light 1.5 (12) 63.5 2 90.9 (8) B A B A

100

Thread size Recommended tightening torque [Nm] 1/8 3 to 5 1/2 28 to 30 3/4 28 to 30 1 36 to 38 Vacuum port Vacuum pressure detection port Exhaust block surface to be held (Width across flats 40) Body surface to be held (Width across flats 40) Exhaust port Branch Port Warning 1.

ZP

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 Vacuum Pad Series ZP Replacement Parts: Pad Unit (With lock ring/

IDG

Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

MLGP

Flat head watchmakers screwdriver Hexagon wrench key 2 Auto switch mounting bracket BMG1-040 Hexagon socket head cap screw (M2.5 x 8l ) Switch mounting screw (M2.5 x 4l ) (Included as accessory) Auto switch Hexagon wrench key 2.5 Hexagon socket head cap screw (M3 x 16l ) Auto switch 9-11-28 28 Compact Guide Cylinder with Lock Series MLGP Operating Range Auto switch model Bore size (mm) 25

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

The grommet type is only available for the JSX10. 57 15 IN 8 25 25 2 x G1/8 1(IN), 2(OUT) port 2 x M3 x 5 Glossary of Terms Specific Product Precautions 14 JSX Series Dimensions: JSX20, 20U Port Size 1/8 Body Material Stainless Steel G: Grommet JSX20 only GS: Grommet with PCB 18 28.5 300 36 300 38 18 36 63 63 39 33.3 IN IN 8 8 30 2 x Rc, NPT1/8 1(IN), 2(OUT) port 30 28 28 2 x Rc, NPT1/

Modular Design with Uniform Body Style

91.4 87.4 93.9 AC30B-V-D m28 32.5 m27.8 43 37.5 63 37.5 64 37.5 64 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AC40B-V-D m28 41.5 m27.8 52 42.5 73 42.5 73 42.5 73 186.9 155.6 153.9 149.5 154 169.5 174 AC40B-06-V-D m28 41.5 m27.8 52 42.5 73 42.5 73 42.5 73 188.9 157.6 155.9 151.5 156 171.5 176 AC50B-V-D m28 51 m27.8 61.5 42.5 82.5 42.5 82.5 42.5 82.5 259.9 228.6 226.9 222.5 227 242.5 247 28

LV50-OMQ0002

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the mounting screws and brackets may become loose. The product body is made of resin.

HRX-OM-O021

Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc1/2 28 to 30Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc1/2 28 to 30Nm 1.0MPa more Automatic water-fill

MLGP

Flat head watchmakers screwdriver Hexagon wrench key 2 Auto switch mounting bracket BMG1-040 Hexagon socket head cap screw (M2.5 x 8l ) Switch mounting screw (M2.5 x 4l ) (Included as accessory) Auto switch Hexagon wrench key 2.5 Hexagon socket head cap screw (M3 x 16l ) Auto switch 9-11-28 28 Compact Guide Cylinder with Lock Series MLGP Operating Range Auto switch model Bore size (mm) 25

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

SQ1000/2000

Dimension L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No. Dimension L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 50 Series SQ1000/2000 Manifold Options for SQ1000/SQ2000 Negative COM specifications The following valve part numbers are for negative COM specifications.

Series PSE digital pressure switches allow pressure to be controlled from a remote location. Series PSE510 is compact and lightweight, allowing the sensor to be mounted where needed. The use of stainless steel for all wetted parts (SUS630 for diaphragm, SUS304 for fitting) allows the PSE520 pressure sensor to be used in a wide variety of gas and fluid applications. Pressure sensor for general

New

28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

MK

RE A B (mm) Mounting Rail mounting style Direct mounting style REC D-A7H/A80H D-A73C/A80C D-F7/F79F/J79 D-F7V/J79C D-F7BA/F7W D-J79W/F7WV D-M9 D-M9V D-F9W VD-F9W D-A79W D-A9 D-A9V D-A7/A8 D-F9BAL D-P5DWL CX Model A 28 28.5 32.5 23.5 28 28 A 28 29 33 24 28.5 28.5 B 6.5 7 6 8.5 11.5 14.5 B 7 7.5 6.5 9 12 15 A 25.5 26 30 21 25.5 25.5 B 4 4.5 3.5 6 9 13 A 19.5 24 24 B 4.5 7.5 10.5 A 31.5 22.5

CLQ

For details, refer to page 9-15-39. 9-10-28

Compressed Air Preparation Filter

Recommended Torque Unit: Nm AFF20 AM20 AMD20 AMK20 AFF50/AFF60 AM50/AM60 AMD50/AMD60 AMK50/AMK60 AFF30 AM30 AMD30 AMK30 AFF40 AM40 AMD40 AMK40 Connection thread 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Applicable model 4. When an SMC One-touch fitting is used, refer to the operation manual for the One-touch fitting.

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M