100

1 o !0 t y i !2 !3 !

MGG

1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

IZx-OMP0064

1 1 1 IZS40-E3 5 4 5 5 6 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 1 2 520 1 1 700 2 1 1540 1660 1720 1 1 1 1 1 1 760 1 1 1 880 1 2 1780 1840 2 1 2 940 3 1000 2 2 1960 2020 1 1 5 6 6 7 6 6 1 3 2 3 1060 1 1 2 1180 1 3 2080 2140 2 4 2 5 1240 4 1360 1 1 3 1 1 2200 2260 2 1 1 7 2 7 1420 1 4 1480 1 4 2380 2440 8 7 AC adapter AC adapter for IZS40 Note) AC cord is only for use in Japan

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

70pvpump

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

JAS

Metric size Inch size 23 3.22 01 1/8" 03 5/32" 07 1/4" Stud position detail A: Right side B: Left side 04 4 06 6 1 For selecting applicable tubing O.D., refer to the Model on page 2. 2 Use 1/8" tubing. Stud 3

Electric Actuator Miniature Rod Type Miniature Slide table Type

Part name Qty (1) Electric Actuator 1 (2) Controller 1 (3) Power supply plug 1 (4) Actuator cable 1 (5) I/O cable (Not use in this section) 1 (6) Teaching box 1 Controller setting kit (7) 1 [The controller setting software, The communication cable, USB cable and conversion unit are included.] Table 2.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

type 2 position single 2(B) (A)4 1 (R1)5 1 (P) 3(R2) 2 position double (Double solenoid) Note) Lead wire is not included.

EXxx-OMS0026CN

(8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -58No.EX-OMS0026CN 2 EX600 0 1 2 1 <1> 0 1 DYB SEN3 SI 4 byte 1 byte [0](EX600-DYB)1 byte [1]SI (EX600-SEN3)4 byte 0 Padding DYB(0) 07 Byte0 Byte1 07 Byte2 815 SEN3(1) Byte3 1623 Byte4 2431 Byte5 Padding 2 byte 6 byte 1 Byte0 byte0 DYB(0)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Triangle mark indicator position EXH outlet 9 Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for

Electric Actuator / Low profile slider type

In positioning 1 1 to product stroke Origin direction: 1 (End side) -10 + product stroke to 9 Origin direction: 2 (Motor side) ORIG offset note 2) 0.00 -9 to +10 product stroke Max force Para protect 1: Common + StepData Changeable parameter 1: Common + StepData, 2: Common Enable SW 2: Disable Select 1: Enable or 2: Disable when using a teaching box Unit name Part no. of each product Only

Plug-in/Plug Lead: Single Unit

VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1

LEF-OM002xx

Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [mm] Note1) 50800 50500 Horizontal 7 10 5 11 18 Work load [kg] note2) Vertical 2 4 1 2.5 5 500 1 to 500 1 to 250 2 to 800 2 to 500 1 to 250 501600 2 to 800 2 to 500 1 to 250 Note2)Speed Stroke range

Compact Manifold Regulator

Semi-standard Accessory Symbol Note 2) Oil-free Symbol None 0.35 MPa setting Note 1) Nonrelieving Without pressure display With pressure display Nil A Note 1, 2) Nil 1 2 3 4 5 6 7 Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.

Compressed Air Preparation Filter

Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V r Port size + a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option t Nil Without auto drain V V V V V b Float type auto drain C*4 N.C.

Magnetically Coupled Rodless Cylinder

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

Electric Actuator / Guide rod Slider

Part name Qty (1) Electric actuator / Guide rod Slider 1 (2) Controller 1 (3) Power supply plug 1 (4) Actuator cable 1 (5) I/O cable (Not use in this section) 1 (6) Teaching box 1 (7) Controller setting kit [The controller setting software, The communication cable, USB cable and conversion unit are included.] 1 Table 2.

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Vacuum Unit Ejector / Vacuum Pump System

purity class is 2:6:3 of ISO8573-1:2010.

Digital Pressure Switch ( compatible)

For OUT2, all "1" in the chart will be changed to "2".