air, N2 Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set
size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.
Warning Warning Recommended Tightening Torpue Unit: Nm Connection thread M5 1/8 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Torpue 1to1.5*1 3 to 5 8to12 15to20 20to25 28to30 36to38 40to42 48to50 48to50 *1 After tightening by hand, use a tightening tool to tighten an additional 1/6 to 1/4 turn as a guideline. Caution Caution Mounting 1.
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.
length: 1 m Condition: Operating press.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m Condition: Operating press.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m RE A B Flow control valve Flow control valve Throttle valve Throttle valve Stop valve REC CX CCVS20/21/22/23 CCVS02 CCVS10/11/12/13 CY Piping bore Piping
Remarks Sensor connector (For PFMB) ZS-28-C-1 Sensor connector (For PFMC and PF3A7) ZS-28-CA-4 Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
length: 1 m Condition: Operating press.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m Condition: Operating press.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m RE A B Flow control valve Flow control valve Throttle valve Throttle valve Stop valve REC CX CCVS20/21/22/23 CCVS02 CCVS10/11/12/13 CY Piping bore Piping
P-1 = A (A B) / 4 H-1 = (A B) / 2 A = Maximum pressure value B = Minimum pressure value For low differential pressure For low pressure For compound pressure PSE533 PSE543 PSE563 For positive pressure For vacuum Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers displayed.
Position loop P constant A 140 110 110 1 to 200 B 100 80 80 C 110 80 80 H 80 140 140 Sets the speed loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Speed loop P constant A 110 140 140 1 to 200 B 120 75 100 C 150 120 120 H 50 80 80 Sets the speed loop I constant.
(Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety. JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines.
s/2 s/5 s -52No.PF-OMX0007-A 1: The air quality class is according to JIS B 8392-1:2012 [4:6:-] and ISO8573-1:2010 [4:6:-]. 2: When using the accumulated value hold function, calculate the product life from the operating conditions, and use the product within its life.
Input voltage 1 V 5 V The sensor input range can be set to the required value and displayed. (Voltage input: 1 to 5 V) Pressure switch/Flow switch can be displayed. M For Flow Sensor / PFMV5 Setting of the display for analog voltage A is displayed for 1 V. B is displayed for 5 V. The range can be set as required.
of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 4 - LEC-G Series/ / 11.5 5 - 2. 2.1 TM 1 (GW)(LEC)DeviceNet *1(LEC) 8 *1 12 2.2 DIN D DIN DN1 DeviceNetTM G 6 - 2.3 PLC LEC-T1-G TM DeviceNet LEC-W2 LEC-GDN1 LEC (RS485)
q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C
) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5 () 510% O 0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16