LECA6_C

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

Thermo-chiller/Rack Mount Type

5 !9 !6 !7 @0 @1 !8 No.

13

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 5 7 10 2 4 4 7 9 11 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 10 11 13 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 14 14 13 20 18 15 18 21 26 33 12 13 11 17

VZ5000

Series VZ5000 Type 21 Manifold VV5Z5-21Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46 85 65 20 408 388 L1 L2 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313

Fieldbus system EtherNet/IP compatible SI Unit

(Ch0&1 in) Monitor under range 0: disable, 1: enable 0: offset binary 1: signed magnitude 2: 2s complement 6..7 Data format Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

mA), Holding 0.5 VA (5 mA) 100 VAC Start-up 0.55 VA (5 mA), Holding 0.55 VA (7.5 mA) 110 VAC Inrush 1.0 VA(5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC 3 position pressure center Note 1) Note 2) Use dry air to prevent condensation when operating at low temperatures.

3 Port Solenoid Valve/

pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 5 Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

VEX1

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 1 2 3 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 220 VAC 50/60 Hz 24 VDC 12 VDC 11 4 11 4 5 6 11 4 9 2 2 7 240 VAC 50/60 Hz 9 Other Option Thread type Nil Rc G NPT NPTF F N T Model Select type Port size Basic

3 Port Solenoid Valve/

pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 5 Safety Standard ISO13849-1 Certified 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

T

(mm) 8 6.5 5 4 Inner tubing I.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

EXxx-OMZ0016

Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

Ionizer Nozzle type IZN10 Series IZS

Tube I.D.: 5 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 0.05 MPa 2 2 0.1 MPa 0.3 MPa 1 1 0.1 MPa 0 0 0 100 200 300 400 500 0 100 200 300 400 500 Tube length [mm] Tube length [mm] Maximum operating pressure is 0.1 MPa. Note 1) Maximum operating pressure is 0.3 MPa. Note 1) Note 1) Refer to Cautions when using the IZN10-11(female threads for piping) on page 448.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators M5 x 0.8 (A port) 14 5 10 26.4 2 x 3.2 (For mounting) 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 28.5 26.1 R P X 13 5 5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10 10 8.6

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Programless controller (with stroke study) Step motor (servo 24 VDC)

OFF ON OFF ON Position number IN3 IN2 IN1 IN0 Position number OUT3 OUT2 OUT1 OUT0 1 (End side) 1 (End side) 2 (Motor side) 2 (Motor side) 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 (A) 10 (A) 11 (b) 11 (b) 12 (c) 12 (c) 13 (d) 13 (d) 14 (E) 14 (E) 24 No.JXC-OMU0030-A (3) The change of I/O output signal The change of I/O output signal under the condition of controller at auto mode.

Digital Flow Switch (Integrated display type)

1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -84No.PF-OMM0005-N PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 91 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -85No.PF-OMM0005-N PF3W704/720/740/711/721 (With temperature sensor)

1.1

IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Mass (kg) 275 259 355 299 320 35 355 299 320 42 IDF-TR-8 E C G B D A 4 x F (mm) A 540 B 400 C 260 D 300 E 11 F 30 G 94 Transformer part no.