MHT2

11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6

3 Port Air Operated Valve Series SYJA300 1

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13

PA300/500/700

A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5 1.9/1.8 2.2/2.2 3.4 4.0 3.3/3.5 3.8/3.6 0.31 0.26 0.86 0.99 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Single Double Closed center 2 position 1.0 4.1 0.41 1.1 4.1 0.29 SYA740-02 1 8 1 4 1.1 [0.49] 0.72 0.42 0.43 0.71 0.80 4.7 [1.7] 2.6 0.35 [0.48] 0.41 3.0 3 position 2.6 5.3 [2.3] Exhaust center Pressure center 294 (165) 0.63 0.39 [0.49] 1.3 [0.65] 2.2 0.49 240 (111) 286 (157) Single Double Closed center 2 position 0.29 1.1 4.9 1.2 4.5 0.27 SYA740-03 1 8 3 8 2.8 [0.95] 0.73 0.34 0.40 1.7 0.80 13

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Auto switch D-A9, F9 Rod end nut C1 X L1 Rod end male thread (mm) Bore size (mm) C1 X H1 L1 32 20.5 23.5 28.5 M14 x 1.5 40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 (mm) Without auto switch With auto switch A B A B U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 9 depth 7 32 50 43 13

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Air Cylinder CP Series Cylinder Positioner Assembly

Slrcke = 0.79 (20mm) with Bool Millmelersrn Pareh$eses 7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS REPAIR KITS SINGLE CLEVIS aoaE d,E L1 dNo NX 2.36 t-05 2 . 9 1 1.06 1 . 1 0 M 1 8 x 1 . 50.61 4.79 \20) 02 +0.070) (,27) (60) (28) \74) 115.5) 047 + 0.003 I 1 o 2.36 0.79 r.05 2.91 1.06 M 1 8 x l . 5 0 6 i (r2 +0.070) (16 "') (28) (60) (15.5) 120) \211 (13+0.070) 1 1 0 ; f f (28 ;)

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13

Modular Type Lubricator Series AL

13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

3 Way,3 Port Solenoid Valve NVZ Series

(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].

Process Pump <Fluororesin Type> Series PA3000

Foot PP Variations Model Body Diaphragm Option Discharge Assembly flow rate (l/min) material material environment PA3310 PAP3310 PA3313 PAP3313 Standard Foot Silencer Automotive operation 1 to 13* Clean room New PFA PTFE Standard Air pilot actuation 0.1 to 9 Foot Clean room * With 3/8" inlet/outlet tube: 1 to 12 1 A for main wetted parts, stance is achieved!

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

3 Port Solenoid Valve SYJ300/500/700 Series

Note) At rated voltage A X A X P R P R 13 Series SYJ500 3 Port Solenoid Valve Valve Specifications External Pilot Type SYJ500R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. This model is suitable for low pressure and vacuum applications.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

orientation Unrestricted Vibration/Impact resistance m/s Note 2) 30/150 or less Rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class H Power consumption W 50/60Hz VCS2: 4.9/4.1, VCS3: 7.7/6.6, VCS4: 10.5/9.3 Inrush VCS2: 22/19, VCS3: 36/30, VCS4: 45/37 Apparent power VA 50/60Hz Holding VCS2: 10/8, VCS3: 15/13

AC Servo Motor Driver (MECHATROLINK-II type)

For details, refer to LECYM Operation Manual,section 3.3.2. 13 - 2.3.2 Sequence Input Circuit (1) Photocoupler Input Circuit CN1 connector terminals 6 to 13 are explained below. The sequence input circuit interface is connected through a relay or open-collector transistor circuit. When connecting through a relay, use a low-current relay.

AC Servo Motor Driver (MECHATROLINK-III type)

For details, refer to LECYU Operation Manual,section 3.3.2. 13 - 2.3.2 Sequence Input Circuit (1) Photocoupler Input Circuit CN1 connector terminals 6 to 13 are explained below. The sequence input circuit interface is connected through a relay or open-collector transistor circuit. When connecting through a relay, use a low-current relay.

ZK2-C

)(43) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -42NO.ZK2-OM00801-B B /ON/OFF H_3 P_1 H_3 100 H_3 P.25F 2OUT2 P_1-60kPaH_3 45 P_1H_3-60-45-105 P_1H_3 -105 H_3 P_1 H_3 ,P_1 H_3 100 -43NO.ZK2-OM00801-B , (1015 ) -44NO.ZK2-OM00801-B ZK2-ZSV-A () No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -45NO.ZK2-OM00801-B No.7 Yes No No.8 No.8 No.9 No.10 No.11 No.12 No.13