Bore sizes (mm): 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M) +/-0.03

Bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 12 & 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M

Bore sizes (mm): 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M) +/-0.03

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 3Y (3+Y), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Body Size: 30, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Y (Upward), Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: EH (E+H), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Series: 3 (VQZ3000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: Y (DIN Terminal), Manual Override: B (Locking Slotted Style), IP65 Compliant: W (Compliant), Port Size: 02 (Rc1/4)

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Stations: 02 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size: 4 (ø1.5), 1st Selection Supply Valve and

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: Y [DIN Terminal w/Connector (DIN 43650C)], Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: 1RY (1 + R + Y)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 2000, Thread: F (G), Port Size: 02 (1/4), Option: B (w/Bracket), Voltage: 5 (24 VDC), Lead Wire: YO (Type Y DIN Terminal w/o Connector), Surge Suppressor: None, Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: YZ (Y + Z)

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: EH (E+H), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: B (Assembly of a Bracket & Set Nuts), Semi-Standard: YZ (Y + Z)