Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of dust, paper dust and scraps, etc. Dust Cover Without dust seal With dust seal Note 1) Dust seal material: Polyurethane Consult P/A for details.

IS3000

C. CR N.C. C. IN Ex. 2) When using contact b only LAMP LIGHTS WHEN PRESSURE RISES. N.C. C. CR Caution Component Parts 1. In the case of using a switch with indicator light, wire the indicator light per the following: 2. Please put the enclosed seal of LAMP LIGHTS WHEN PRESSURE RISES. or LAMP GOES OUT WHEN PRESSURE RISES. on the equipment where it is easy to see.

VY511, VYU5

(Refer to graph A) No AW AMR AWM Graph C: The balance completion time Yes AWD 5 ITV No Is the cylinder speed appropriate? (Refer to graph B) 4 VBA Completion time (sec) 3 VE Yes VY 2 Use graph C as a guide for the balance completion time.

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: M9P, Lead Wire Length(m): 5, The number

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 25, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): null～1.0, Port thread type: NPT,

Magnet: D (Built-in), Mounting: C (Single Clevis), Bore Size: 40mm, Stroke: 100mm, Rod End Thread: Male Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: Built-in, Mounting: Single Clevis, Bore Size: 40mm, Stroke: 100mm, Rod End Thread: Male Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: M9P, Lead Wire Length(m): 5, The number

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 25, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): null～1.0, Port thread type: NPT,

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

MXF

Dimensions: Stroke Adjusting Bolt (mm) Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions

ITVH

AP100 Port size B 2 1/4 3 3/8 Note) EXH port: 1/4 Built-in regulator EXH port: M5 Solenoid valve EXH port: M5 L-bracket C * Bracket is included. 957 ITVH2000 Series Standard Specifications Model ITVH2000 Minimum supply pressure Whichever is higher: 0.5 MPa or the set pressure + 0.2 MPa Maximum supply pressure 3.0 MPa Set pressure range Note 1) 0.2 to 2.0 MPa Power supply Voltage 24 VDC 10%

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

Model Plug side only DMK6P-23 DMK6P-04 DMK12P-23 DMK12P-04 Multi-connector DMK6-23 DMK6-04 DMK12-23 DMK12-04 Socket side only DMK6S-23 DMK6S-04 DMK12S-23 DMK12S-04 Cover Clamp ring 6 DMK-C-6 DMK6-P01 12 DMK-C-12 DMK12-P01 Specifications Applicable tubing materials Applicable tubing O.D.