VNC

B VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 278 293.5 317.5 310.5 326 350 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65 80

lPSMt

Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)

lPSMt

Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)

Built-in One-touch fittingsz, x, c: ?4z, x, c: ?5/32andquot;z, c: ?6, x: ?4z, c: ?1/4andquot;, x: ?5/32andquot;100 g or less (without option)

Built-in One-touch fittingsz, x, c: ?4z, x, c: ?5/32andquot;z, c: ?6, x: ?4z, c: ?1/4andquot;, x: ?5/32andquot;100 g or less (without option)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

HRX-OM-S004

C, use a 15% aqueous solution of ethylene glycol. Tap water may be frozen in the thermo-chiller which may damage the product. 3.5 Circulating Fluid Supply HRS Series 3-32 HRX-OM-S004 Chapter 3 Transport and Setting Up 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

HRX-OM-W032

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

Clean Gas Filter

Width across flats 127 Model A URJ 1/4 URJ 3/8 B 22 26.5 C 19 22 SFC105-02 SFC105-03 311 SF Series Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of dust, paper dust and scraps, etc. Dust Cover Without dust seal With dust seal Note 1) Dust seal material: Polyurethane Consult P/A for details.

IS3000

C. CR N.C. C. IN Ex. 2) When using contact b only LAMP LIGHTS WHEN PRESSURE RISES. N.C. C. CR Caution Component Parts 1. In the case of using a switch with indicator light, wire the indicator light per the following: 2. Please put the enclosed seal of LAMP LIGHTS WHEN PRESSURE RISES. or LAMP GOES OUT WHEN PRESSURE RISES. on the equipment where it is easy to see.

VY511, VYU5

(Refer to graph A) No AW AMR AWM Graph C: The balance completion time Yes AWD 5 ITV No Is the cylinder speed appropriate? (Refer to graph B) 4 VBA Completion time (sec) 3 VE Yes VY 2 Use graph C as a guide for the balance completion time.

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

MXF

Dimensions: Stroke Adjusting Bolt (mm) Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions