PSxx-OMU0002CN

1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -72No.PS-OMU0002CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -73No.PS-OMU0002CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -74No.PS-OMU0002CN-D ZSE20A() ZSE20AF() ISE20A() 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa / 0.1 kPa 0.001 MPa 500 kPa 1.5 MPa DC1224 V10 (p-p

PSxx-OMU0008CN

74No.PS-OMU0008CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -75No.PS-OMU0008CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -76No.PS-OMU0008CN-D ZSE20C ZSE20CF ISE20C ISE20CH () () () () SUS630SUS304 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa -0.1002.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa -0.1052.100 MPa / 0.1 kPa 0.001 MPa 500 kPa 2 MPa 4 MPa DC1224 V10 (p-p

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

, Grommet terminal, Conduit terminal, DIN terminal 1 (P) 3 (R) Note 1) Use dry-air at low temperature.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

E,R.L.

Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

E-P HYREG ® Series VY1 1

pressure (MPa) P port pressure (MPa) VY1 VY140 0 1 VY150 0 1 G PPA A port pressure (MPa) A port pressure (MPa) Set point Set point Set point Set point Set point Set point AL P port pressure (MPa) P port pressure (MPa) VY190 0 1 VY170 0 1 A port pressure (MPa) A port pressure (MPa) Set point Set point Set point Set point Set point Set point P port pressure (MPa) P port pressure (MPa) 14-10

VHK

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

Modular Type Filter Regulator Series AW

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Ozone Resistant

100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ

VNB

VXA I (DIN terminal: D) VN Main port Rc A Model B C D E F G H I J K L M N P Q R S T U LVC VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 52 26 4.5 24.3 2.3 25 34 55 LVA 80 90 50 60 35 40 17.5 20 84 100 92 108 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154 170 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 LVH Port size

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

P port on both sides and exhaust from EA/EB port on both side.

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

, 11 P.12 to P.15 P.1, 2 P.3, 4 P.5 to 9 P.5 to 9 Adsorption is possible even on a slanted surface.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

EXxx-OMQ0015CN

[GSDML ] PLC [SC_MonSs] [Monitior Short Enable 1 Circuit(Power) ] Disable 1 Enable [OC_Mon] [Monitor Open 2 2 Disable Circuit] [Inrush] [Inruch Current Enable 100 mse 3 Disable Filter] 0.1 ms [Filter_T] [Input Filtering 1.0 ms 4 1.0 ms 10 ms Time] 20 ms 1.0 ms [SigExt_T] [Input Extention 15 ms 15 ms 5 100 ms Time] 200 ms Enable Val: 1 65000 4 ON/OFF [Counter] []