Rotary Actuator

With surge voltage suppressor Note) Grommet L-type plug connector M-type plug connector DIN terminal DIN (EN175301-803) terminal Conduit terminal MRQ [IP65 compatible] [IP65 compatible] [IP65 compatible] Z With light/surge voltage suppressor R With surge voltage suppressor (Non-polar) U With light/surge voltage suppressor (Non-polar) G: Lead wire length 300 mm H: Lead wire length 600

Possible to transfer a workpiece at low-speed.

Symmetric type Weight Connection port Connection port (g) 10 20 30 50 Size 600 570 1150 1090 1460 1390 2390 2280 90 spec. 180 spec. Values not including the auto switch weight. Dimensions GE (Arm operating range) EB Note) EB (Max. EA) 22.5 (Max. EE) GA ND GB EC ED EF 2 x K Hexagon socket head set screw GD GC 0.5 NA NC NB Note) This component does not exist for 180 type.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

Large blow and

Vacuum pressure Vacuum pressure ---5 ---5 1,200 500 ---4 ---4 1,000 400 Suction flow rate Suction flow rate 800 ---3 ---3 300 600 ---2 ---2 200 400 ---1 ---1 100 200 Air consumption Air consumption 0 0 0 0 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] Supply pressure [MPa] ZH30-X185 ZH40-X185 ---7 ---7 3,500 5,000 Suction flow rate [L/min (ANR)] Note 1) Air

MY2

Standard Strokes Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1mm increments, up to the maximum stroke. However, add "-XB10" to the end of the part number for non-standard strokes from 51 to 599.

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

MK

end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1 200 139 100 60.8 2 R 20 12 Clamp part 298 208 149 90.2 3 H CE1 Performance of non-rotating 0.7 to 1.4 370 258 185 112 3.7 R 25 12 Clamp (Retracted stroke end) 490 341 245 149 4.9 H CE2 600

ML2B

W (N) 600 (1800) l 500 ML2B40 ML2B40 Caution (1500) If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

CNG

Graph (1) 10 500 st 600 st 700 st 700 st 500 st 600 st 400 st 400 st 4 5 300 st 300 st 3 200 st 200 st Load movement time: t (S) 2 100 st Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com [Example] Example) 1 0.4 0.5 0.3 V' 0.2 300 0.1 V W 100 200 1000 400 500 Maximum

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Maximum operating pressure Pv (MPa) 1 5 0.3 Model Allowable load mass mv (kg) Model Cushion Stroke Stroke (mm) CYV15 CYV32 CYV15 CYV32 25 30 8-18-6 6 Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size MG 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) Courtesy of Steven Engineering

90

Flow Rate Characteristics Relief Characteristics IR1020-01-A Supply pressure: 0.7 MPa IR1020-01-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate:

ITVH

Flat bracket assembly (including mounting screws) P398020-600 L-bracket assembly (including mounting screws) P398020-601 ARJ Power cable connector Straight type 3 m P398020-500-3 Right angle type 3 m P398020-501-3 AR425 to 935 Straight type cable connector Right angle type cable connector ARX AMR ARM L-bracket ARP Flat bracket IR-A Mounting screw for the body Mounting screw for the body Right

25

700 800 900 1000 0 100 200 300 400 500 600 Flow rate (L/min [ANR]) Flow rate (L/min [ANR]) How to measure b) Both sides air supply (Connecting tube: O.D. 6 x I.D. 4) (IZS4-820, 1120, 1300) a) Single side air supply (Connecting tube: O.D. 6 x I.D. 4) (IZS4-340, 400, 460, 580, 640) Air supply measurement Pressure measurement Air supply measurement Pressure measurement 10 mm 10 mm 10 mm c)

Fieldbus System

Analog Output Unit EX600-AYA Model Output type Current output Voltage output Output connector M12 (5-pin) socket Note) Output channel 2 channels (1 channel/connector) Supplied voltage 24 VDC Max. load current 0.5 A/connector Protection Short-circuit protection Output signal range EX600-AYA 12 bit resolution 0 to 20 mA, 4 to 20 mA 0 to 10 V, 1 to 5 V, 0 to 5 V 600 or less 1 k or more Load

energy saving effect

grounding cable) R8-5 M5 A HRSH100--40 20 A 3 x 5.5 mm2 (3 x AWG10) (Power supply) 1 x 14 mm2 (1 x AWG6) (Grounding cable) R5.5-5 (Power supply) R14-5 (Grounding cable) HRSH150--40 HRSH200--40 HRSH250--40 3-phase 380 to 415 VAC (50/60 Hz) 30 A Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600

53

3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 3 x 5.5 mm2 (3 x AWG10) (Power supply) 1 x 14 mm2 (1 x AWG6) (Grounding cable) R5.5-5 (Power supply) R14-5 (Grounding cable) HRSH090-ll-40 3-phase 380 to 415 VAC (50/60 Hz) 20 A Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 Pressure Control Equipment 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600

Series 12-REA Sine rodless cylinder

, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

mm 1000 mm 1500 mm 2000 mm 3000 mm 10 mm (Semi-standard) 52-SY9000 Manual override Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nil D E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.