25

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

CDQ2BP series

@w, s Bore Siee Noaulo swjtch builtjn (hjglr magnelic Add L and Z at the end of part numberlor 3m and sfi, respectively. "ALrto switch detail: see pgs. 10-11.

IDX-OM-W094

3 oC 204 312 552 810 (ANR) 2 7 oC 300 408 654 900 m 3/h 10 oC 360 480 720 960 3 oC 216 331 585 859 7 oC 318 432 693 954 3) 10 oC 382 509 763 1,018 MPa 0.7 oC 35 oC 25 () AC230V(50Hz) 10% 4 7-2 5) W 820 1,300 1,950 2,220 5) A 4.9 7.2 12.0 13.0 (30mA) 6) A 10 15 20 30 R410A (HFC) GWP2,088 7) g 39010 53010 63010 78010 :0.1MPa) mm 12 R1 R1 1/2 R2 kg 49 68 95 110 :1 :2 1

Digital pressure switch for energy-saving control ejector

ZQ-OM01501 How to order ZQ ZSV A M W 2 A (1) (2) (3) (4) (1) Vacuum pressure switch Symbol Pressure range [kPa] output specifications A -100 to 100 NPN1 output + Energy Saving Function B PNP1 output + Energy Saving Function (2) Vacuum pressure switch unit specifications Nil Note 1 With unit switching function M Fixed SI unit [kPa] Note 1 ) The unit conversion function is not for use in Japan

LG1H

) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

IDX-OM-W038

W 038 5 5 5. 1 O FF O FFO N 2-3 ( 1 /) ( ) 3-1, 3-2 -5+10% 600m m 2-3 ( 1 /) 4-4 IDH Series 51 5. 1 I D XO M W 038 5 4-1 2 3-1 4-1 6-1 N .

44

8 13.5 5 L1 M L1 M 4 3 5 2.3 d 6 4 10 3.3 10 10 15 5.8 16 A L2 H2 8 6 H2 6.6 5.3 12 14 17.4 25 30 41 22.2 H1 Connection thread 25.6 10 7.5 6.8 27.5 2 x Applicable tubing 7.6 15 17 20.9 35 25.6 10 8 7.3 47 32 27.5 25.6 12 9 8 48 27.5 16 17 23.5 8.5 41 25.6 12 10 9 61 27.5 31 32.9 16 13 9.3 108 12 21 22 26.2 Reference dimensions after installation of R thread Straight Union: KFG2H Applicable

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

OMU0023

Maximum value for the LAT3-10: 10 [m]) The minimum values vary depending on the movement mode as described below. Minimum value in REL operation: Card Motor stroke [m] x -1 (e.g. Minimum value for the LAT3-10: -10 m) Minimum value in ABS operation: 0 Note 2: Refer to the following examples for how to set the pushing speed.

Air Cylinder RSQ Series Stopper Cylinder

Rod end contiguration Auto switch mounting bracket o-Am H AEOH A-7trC A80C D F79 D J79 D J79C ' The leler model is applied only 10 bore siz$ i M 3 r 0 . 5 x S l The slandad ead w 6 anglh s 0.5m.'L' 5 added lor 3m Ltrdfl,#:"[ffi."

asilltr

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

Cylinder Speed Checker

A M8-3 pin D M12-4 pin Grommet (In-line) M9N r Auto switch with lead wire entry Grommet (Perpendicular) M9NV 2-color indicator Grommet (In-line) M9NW Grommet (Perpendicular) M9NWV Water resistant Grommet (In-line) M9NA Lead wire length S 0.5 m M 1.0 m w Display part Grommet (Perpendicular) M9NAV Please contact SMC for other applicable auto switches. r Auto switch with lead wire entry y

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

VXD21/22/23

The allowable voltage fluctuation rate is 10% of the rated voltage value for both AC and DC.

VCS

Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

CU

Lead wire length (m) Load voltage Auto switch part no.

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

Series IDG

IDG 10 M 03 X016 Optional specifications Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard 10 Flow direction (rightleft) With dew point indicator R S 20 Standard equipment 30 50 Drain discharge symbol Standard dew point Size 3 10 20 30 50 5 Drain discharge method Nil Manual valve C N.C. auto drain D N.O. auto drain Drain guide (aperture 1/4, without valve) J Port size Note) IDG50M

Ionizer

Note) Bar length (mm) KJH04-M5-X34 460 to 700 860 to 1580 1660 to 2220 Note) Plug (M-5P-X112) 1 pc. is shipped together. Symbol X13 2 Non-standard power supply cable length Available in 1 m increments from 1 m to 20 m. Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power cables for 3 m and 10 m lengths.