2 i e !0 o w !6 !5 !4 !3 y r t !1 A A Enlarged view of A Component Parts Description No.
Right Left Rear Front w q Parts List e Part no. Applicable model No.
MVGQ CC RB J D-X 20Data 10-6-11 11 Series RHC Dimensions: Basic Style 20 to 40 Rc P Rc P GA H2 NN NN GB I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B C D E
MHZ-A1010 MHZ-A16010 MHZ-A2010 MHZ-A2510 Lever assembly MHZJ-A1004 MHZJ-A1604 MHZJ-A2004 MHZJ-A2504 3 * Material of seal: NBR: Nitrile rubber FKM: Fluoro rubber Replacement parts / Grease pack part no.: GR-S-010 (10g) * Material of dust cover: CR: Chloroprene rubber FKM: Fluoro rubber Si: Silicon rubber * End boss type: W: One-touch double fitting K: One-touch fitting M: M5 port E: Side ported
14Depth10 160 37 16 18 107 45 170 110 80 M12 X 1.75Depth21 22 M10 X 1.5Depth20 17Depth12 37 10.5 194 42 19 23 142 Bore (mm) WH W V U T S R Q J O I N Z P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105
For vacuum/ compound pressure ZSE30A 01 N M Option 3 Operating manual Booklet Symbol Calibration certificate Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa Nil Y K T Piping Option 2 01 R1/8 (M5 female threaded) None Nil Bracket A N01 NPT1/8 (M5 female threaded) Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting
Note q Lead wire and M12 connector (3 m), Straight ZS-37-A 1 pc. w Lead wire and M12 connector (3 m), Right angle ZS-37-B 1 pc. e Assembly-type connector PCA-1557743 1 pc. r Adapter with restrictor Rc1/4 ZS-31-X175 1 pc. t Adapter with restrictor Rc1/8 ZS-31-X188 1 pc. y Orice M5 ZS-48-A 1 pc. u q + e ZS-37-A-X448 The lead wire and connector are Nil Voltage output type 1 to 5 V 28 Current
Right Left Rear Front w q Parts List e Part no. Applicable model No.
Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150
C1 Specifications Max. display pressure M48 x 2 Symbol Specifications Symbol Unit: MPa Option E Oil-free, external parts copper-free 0.2 0.4 0.7 1.0 1.5 2 4 7 10 15 Symbol Nil M With M5 (Female thread) Specifications For mounting method, refer to page 14-11-15.
A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.
Apply proper screw tightening torque within the following range. 6: 5.9 to 6.4Nm 10: 10.8 to 11.8Nm 16: 20.0 to 21.0Nm 3 Air Cylinder CJ2 2122CJ2/ 1011Basic style (B) / CJ2B, CJ2B 10112122Rubber bumper 6 D NDh8 MM NN GA GC Piping port 3-M5 x 0.8 9 CA A F T NA NB 8 0 -0.3 BA 0 -0.3 S + Stroke H Z + Stroke 10 and 16 D NDh8 MM NN GA GC Piping port 3-M5 x 0.8 GB Piping port M5 x 0.8 CB CA Head
<> <> ON(SVON ON) Unable to find motor phase in set time. (1-193) E <> ON SVON ON <> Output current limit exceeded E <> set value (1-194) <> Current sensor abnormality has occurred. (1-195) E <> <> Position error overflowed (1-196) E <> <> EEPROM Memory abnormality has occurred (1-197) E <> EEPROM 10 <> CPU CPU CPU error (1-198) E <> -93No.JXC-OMT0001CN-C 14. / A () 50mm
E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke (mm) A B C D E F GA GB H H1 H2 I Bore size (mm) Stroke range (mm) Effective thread length 26 8 5 44 47.5 53.5 16 14.5 10 18 40.5 32 15.5 200 to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56 21 20.5 16 24 61.5 53 21 200 to 1000 40
(0-149) D RESET SVON <> <> (0-901) E <> (0-902) E <> <> <> (0-910) E <> SDRAM SDRAM (0-911) E <> 87 No.SFOD-OMT0009CN-B code <> FROM FROM (0-912) E <> <> Modbus (CI 1 2 CI 3 4)OFF <> Modbus (0-913) E <> (0-914) E <> 88 No.SFOD-OMT0009CN-B (2) code <> , [] (1) (2) =0 (3) (4) (5) (6) (7) (1-048) B RESET <> <> [] (1) -+ (2) (1-049) B <> RESET <> + JOG <> + (1-052
C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].
A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 Lead wire and M12 connector ZS-37-A ZS-37-B -17No.PS-OMS0005-E Adapter with throttle ZS-31-X Model No. D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0005-E Revision history A: Contents are added. B: Contents are added. C: Contents revised in several places. D: Contents revised in several places.
MSUB7 (Single vane/Double vane) MSUB7-S/D Top ported: MSUB7-SE A port B port 4 x M4 x 0.7 depth 7 2 x M5 x 0.8 2 x 5.5 through Single vane 2 x M5 x 0.8 depth 10 Long groove depth 5 (Positioning pin hole) 2 x 5.5 through 3 x 4H9 depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2 x 5.5 through A port B port 2 x M5 x 0.8 2 x M5 x 0.8 depth 10 Chamfer Chamfer (Single vane