Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -
Plug-in Unit 7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No. Blue None u Purple White i Gray Black o Lead wire color Dot marking Terminal no. White Black !0 Black None q White Red !1 Brown None w Yellow Red !2 Red None e Orange Red !
t y e i w Note Manganese phosphate Chromated Description Material Steel Aluminum Steel Steel Synthetic rubber Steel Steel Steel No. 1 2 3 4 5 6 7 8 Stud Case Ring Cap Dust cover Set screw Rod end nut Washer Black zinc chromated Zinc chromated Zinc chromated J J Dimensions JC20 to 63 M Center of sphere M U U D F G P H A R E B Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore
6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.
SRP1-M5 SRP1-01 Pressure gauge part no.
Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.
Rod boot Nil J K Without rod boot Nylon tarpaulin Heat resistant tarpaulin Cushion type When equipped with rod boot, foot and front flange type brackets are attached before shipment.
Description Minimum operating pressure 0.07 0.07 0.05 0.05 Standard stroke Stroke range Bore size Allowable Kinetic Energy (J) Stroke range 1 to 29 12, 16 20 25 12 16 Bore size (mm) 1 to 49 20, 25 Standard 0.055 0.09 0.022 0.038 Part no.: CQSWB25-47D CQSWB25-50D with 3 mm width spacer inside. B dimension is 79 mm.
Material Note Description Aluminum alloy Hard anodized Cylinder tube q Aluminum bearing alloy Anodized Collar w Aluminum alloy Chromated Piston e Stainless steel Piston rod A r Stainless steel Piston rod B t Carbon tool steel Phosphate coating Snap ring y Carbon steel Nickel plated Rod end nut u Urethane Bumper i Aluminum alloy Chromated Switch spacer o Magnet !0 NBR Rod seal !
5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.
Dimensions Double clevis type/MQMLD 6, 10, 16 (integrated type) +0.030 0 CDH9 Z + Stroke R Clevis pin (CDd9 ) S + Stroke -0.030 -0.060 U H BB NB CX +0.1 0 GB T-bracket Refer to page 18 for details.
Acceleration/ deceleration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. -35-
6.6.2 Motor speed Configuration
Series IDFS IDFS6E/8E/11E Evaporation thermometer G H Illumination switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M A B Model IDFS6E IDFS8E Port size J C D M F
Grease pack part no.: GR-S-010 (10 g) D-X 511 MGPW Series 20 to 63/MGPWM Stroke Z 4 x YY depth YL Stroke Z L 4 x MM depth ML 4 x NN through DA DB H V U X T R PW 2 x P OL GA GB 4 x OA through FA FB 2 x OB counterbore Q J K C + Stroke B + Stroke E S G A + Stroke For intermediate strokes other than standard strokes, refer to Manufacture of Intermediate Strokes on page 499.
Type Series IDFS 6E, 8E, 11E How to Order Voltage Model Options 6E 8E 11E 4 6 A C L IDFS M R Model Air compressor Refrigerant Voltage R134a 5.5kW 7.5kW 11kW 6E 8E 11E Single phase, 240VAC (50Hz) Single phase, 220VAC (50Hz) 4 6 Option M A C L R With anti corrosive treatment With heavy duty auto drain With circuit breaker With motor operated auto drain With cool compressed air Model IDUF6E
Type Series IDFS 6E, 8E, 11E How to Order Voltage Model Options 6E 8E 11E 4 6 A C L IDFS M R Model Air compressor Refrigerant Voltage R134a 5.5kW 7.5kW 11kW 6E 8E 11E Single phase, 240VAC (50Hz) Single phase, 220VAC (50Hz) 4 6 Option A C L R M With anti corrosive treatment With heavy duty auto drain With circuit breaker With motor operated auto drain With cool compressed air Model IDUF6E
(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Through-hole/Both ends tapped common (Basic) S T R Q H (Rod size) AE (Rc, NPT, G) (2 locations) (Port size) E effective thread depth F Yh9 Z X 5.5 (The dimension on the opposite side is the same.) I (4 locations) 0.1 0.2 D G W AC (4 locations) (The dimension on the opposite side is the same.) A AA C J L L J K (4 locations) Flat washer With 4 pcs.
Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.