Escapements Series MIW/MIS

thread 4-FE through FG FF FG FF Attachment mounting thread 2-FE thread depth FH FC FG FF FC NA FD NA FD FB FA Stroke adjuster Scraper RG RH SA (JA) SC SB Hexagon width across flats RB 2-M5 x 0.8 Supply port RA Stroke adjuster Hexagon width across flats RC RH RG RD At the maximum stroke RE Arrangement range RF RA RB RC RD RE RF RG RH RJ 8 10.5 M5 x 0.8 M8 x 1 6 9 Model MIW12-12 MIW20-20 8

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

5 Port Solenoid Valve, Series VQC

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP X 1 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

VQ5000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Speed controller AS420-04 Silencer AN400-04 SGP (Steel pipe) dia. x Length 10A x 1 m Grommet type IP65 compatible Enclosure 2-6-1 Base Mounted 2 Series VQ5000 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.

Low Profile Guide Type

0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth

CY1F

0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

port Note) M5 x 0.8 M5 x 0.8 M3 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1R2 (PRA) 2R3 (ARR) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv Type SS3YJ7-20 1/8 2.2 2.2 2.1 2.2 2.0 1.6 2.1 0.34 0.39 0.35 0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 3 1 4 6.5 depth 3.4 4

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 3 1 4 6.5 depth 3.4 4

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

R1/4 (M5 x 0.8 female threaded) ON OFF NPT1/4 (M5 x 0.8 female threaded) G1/4 (M5 x 0.8 female threaded) 1 Red Green Rc1/8 2 Green Red URJ1/4 (VCR fitting compliant) 3 Red Red TSJ1/4 (Swagelok fitting compliant) 4 Green Green Output Output display Analog current output is newly added. It lights when OUT1 or OUT2 outputs. Advantageous when it is wired for a long distance.

CRB1/Size: 10, 15, 20, 30

(CRB1BW10: 0 to 230) CRQ Port position On the body side or in the axial direction Body side M3 X 0.5 M5 X 0.8 M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 Size MRQ Axial direction M5 X 0.8 Double shaft (One flat chamfering on each shaft) Shaft MSQ Angle adjustable range of the unit 0 to 230 0 to 240 Mounting Basic, Flange MSUB Auto switch Mountable (Port: Only on the body side) Note 1) Make sure to

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Applicable tubing (O.D. x I.D.) 0604 0806 1075 1008 1209 6 x 4 8 x 6 10 x 7.5 10 x 8 12 x 9 VCKH VCKK VCKL 40 swivel elbow 90 swivel elbow Male connector Option Blanking Plug Assembly Type Model Description Qty.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Compact Cylinder

Example) Bolt M5 x 60 L 2 pcs.

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

CV/MVGQ

RB 25 8 20 M26 x 1.5 210 177 137 185 152 112 160 127 87 25 8 20 M26 x 1.5 212 164 204 237 179 139 187 154 114 162 129 89 J 27 10 23 M32 x 2 246 188 234 271 213 259 296 209 163 221 184 138 196 159 113 D-X 20Data 10-15-37 Series CVM3 Rod Side Flange Style (F) Single acting, Spring return: CVM3F S Bore size Stroke M5 x 0.8 Width across flats B2 Width across flats B1 Manual override Mounting

PA300/500/700

0.5 x 32 VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Tightening Torque for Mounting Screw VPA344 1/8 1/4 VPA544 1/

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

HY C M A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 16 D-X Individual -X Technical data Series CJ5-S Dimensions Rod side flange style (F): CJ5FS R V 0 0.3 0 0.3 CA BA BB Rod cover side GB Piping port 2 x M5 x 0.8 GA NN MM Piping port M5 x 0.8 Cover surface 0 0.3 BA CB D FY FB With head cover port in axial location (R) 2 x FC Mounting hole FX FZ NA F FT 0 0.3 BB

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -