ZQ-OM01601

JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - () () () () 4 - () * 100 JIS B 8392-1 1.1.21.6.2:2003 5 - * FG 100 m/ s2 ,() 6 - *() 6 33 () () 10m DC(-)() * ( ) () CE CE , 550 7 - * ON, , 1015 10 1% 1745 1 ,OFF 4 OFF * 8 - ZQ ZSV A M W 2 A (1) (2) (3) (4) (1) [kPa] A -100 to 100 NPN 1 + B PNP 1

SMC Pneumatic Clean Series

11-CXS -0.032 1 2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

Digital Flow Switch (Integrated display type)

Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range Model Min.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

0.35 (With light: 0.4 (DIN terminal with light: 0.45)) 1 (P) 3 (R) 1 (P) 3 (R) Power consumption (W) DC 0.1 (With light only) External pilot 1.4 (With light: 1.5) 100 V 110 V [115 V] 200 V SYJ51 R 2 4 SYJ52 R 2 4 1.6 (With light: 1.7) [1.7 (With light: 1.8)] (A) 2 (A) 2 Apparent power (VA) AC X X 2.3 (With light: 2.4) 2.5 (With light: 2.6) [2.7 (With light: 2.8)] 220 V [230 V] 1 (P) 3 (R

LFE-OMZ0013

Approx. 1.00 mm Colours Brown, blue, black, white, grey Sheath Material Heat and oil resistant plastic Finished O.D. 3.5 mm -63No.LFE*-OMZ0013 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage. 33 Series SYJ700 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1R2 (PRA) 2R3 (ARR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ712 SYJ722 SYJ714 SYJ724 SYJ714 SYJ724 Body ported 0.76 0.69 0.69 0.63

PFxx-OMU0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 71 No.PF-OMU0002-D Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

Sensor Monitor

Remarks ZS-31-B Straight, 5 m Power supply/output lead wire ZS-31-C Right angle, 5 m Assembly type connector PCA-1557743 Caution The sensor connection lead wire (M12-M12) is not provided by SMC. It should be prepared by the user.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Load voltage Electrical entry Lead wire length (m) Flexible lead wire (-61) Auto switch model Applicable load Pre-wire connector In-line Perpendicular 0.5 (Nil) 3 (L) 5 (Z) DC AC Type Special function Electrical entry Indicator light Wiring (Output) 3-wire (NPN) 3-wire (PNP) 24 V 12 V Solid state switch M9NV M9N 5 V IC circuit M9PV M9P Relay, PLC Standard Grommet Yes 2-wire M9BV M9B

Free-Mounting Cylinder with Air Cushion Series CU

Oil proof heavy duty vinyl cord: 2.7, 0.5m D-F9N(V), D-F9P(V): 0.18mm x 3 cores (Brown, Black, Blue [Red, White, Black]) D-F9B(V): 0.15mm x 2 cores (Brown, Blue [Red, Black]) Note) Refer to page 7 for auto switch common specifications and lead wire length. Internal circuits Weights (g) D-F9N(V) D-F9N(V) D-F9P(V) D-F9B(V) Auto switch part no.

IDX-OM-W028

IDX-OM-W028-B Operation Manual PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDU22E-23(-C,L,R,T,V) IDU22E-30(-C,L,M,R,T) IDU37E-23(-C,L,R,T,V) IDU37E-30(-C,L,M,R,T) IDU55E-23(-C,L,R,T,V) IDU55E-30(-C,L,M,R,T) IDU75E-23(-C,L,R,T,V) IDU75E-30(-C,L,M,R,T) Please read this manual prior of using the air dryer. Keep the manual readily available for reference.

Rotary Gripper Series MRHQ

4-M4 x 0.7 Depth 6 N I J E A D P A A M N R R SMC E O P T P A I R R 6 G Y R A I 18 2 6 21 9 5 23 5 Side A Side B Scale: 60% 9 Series MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3 x 0.5 M5 x 0.8 14.6 closed (mounting screw attachment ) Finger closing port 4 15 3 Max. 7.3 7 +0.03 0 3-4H9 42 78

Rotary Table

Cylinder Position of rotational axis: Parallel side b and Position of rotational axis: Through the center of diameter and gravity through the center of gravity a b a r 2 3 2 2 a r + a I = m 12 I = m 12 3. Thin rectangular plate (Including 8.

1

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

IDX-OM-W034

IDX-OM-W034-B PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFB22E-11 IDFB22E-11 K,R,S,T,V IDFB22E-23 IDFB22E-23 K,R,T,V IDFB37E-23 IDFB37E-23 K,R,T,V IDFB55E-46 IDFB55E-46 L,R,T,V IDFB75E-46 IDFB75E-46 L,R,T,V This manual is intended to explain the installation and operation of the product.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

(L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 21 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m 512 Line Filter FH34/44/54/64 Series Dimensions Companion Flange Bolt Dimensions Comparison flange base D M (Drill) Port size Flange (JIS B2291) O-ring Bolt dimension Model (JIS B240-1-A) C B FH441 FH541 FH641 FH341 FH441 FH541 FH641 FH341 FH441

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Methyl Ellryl Ketone o o o I o o Mineral Oil o D o tr tr tr o Motor Oil o o tr n o Naphtha o o o Nitrate 10oi0 I I I I I V V Ozone o o o o I V V Ozon Low Concenlration o tr o o Petroleum o o o o o tr Petroleum Oils a o tr o o D Soapy Water EI B o o o o B tr Sodium Chloride tr o o tr o D o Sodium Nikate o o c o o Sodium Sulfide o o o o o o Sulturic Acid (H2SO4) 1O"h I o V I I v V a Tolu6ne

Digital Flow Switch (Remote type sensor unit)

L/min) PF2W504(T) A 0.5 4 PF2W520(T) B 2 16 PF2W540(T) C 5 40 PF2W511 D 10 100 Analogue output A B C Voltage output 1 V 1.5 V (1.4V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA The value in ( ) is when PF2W511 is used.

180

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Pre-wired connector Applicable load 5 (Z) Type Electrical entry Special function Indicator light Wiring (Output) 0.5 (Nil) 1 (M) 3 (L) DC AC Perpendicular In-line M9NV M9PV M9BV M9NWV M9PWV M9BWV M9N M9P M9B M9NW M9PW M9BW M9NA 3-wire(NPN) IC circuit 5 V, 12 V Solid state auto switch 12 V 3-wire(PNP) 2-wire 3