IDX-OM-W053

1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5

HRX-OM-W032

3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-6 3.2.3 Location . 3-7 3.2.4 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation

Cylinder with Lock

3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Digital Flow Switch ( compatible)

Accuracy Analogue output accuracy 3%F.S.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

PSE530/200

SET Proceed to the auto shift mode. 16-3-15 15 Series PSE530/200 Operation 3: Special Setting 3 Auto shift Refer to C Auto shift function on page 16-3-17 for details.

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 092R (3 Port, Universal), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 095R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 095R (3 Port, Universal), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R1 (N.C., Port 1 IN, Port 2 Out), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R1 (N.C., Port 1 IN, Port 2 Out), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R2 (N.O., Port 3 IN, Port 2 Out), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R2 (N.O., Port 3 IN, Port 2 Out), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R4 (N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R4 (N.O., Port 3 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)