SFOD-OMT0009CN

-COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

SI unit ( device)

27 26 25 24 31 30 29 28 27 26 25 24 Force output 4 24-31 Output 28-31: Setting value F0 1 1 1 1 0 0 0 0 0F 0 0 0 0 1 1 1 1 Hold last state Structure of Output Switching Counts (index 68) The output switching count parameter consists of thirty-two sub-indices that represent bit fields with a size of 32 bits each.

SFOD-OMT0010

Product Specifications . 25 4.1 Basic Specifications . 25 4.2 Parts Description . 26 4.3 Dimensions . 27 (1) Direct mounting . 27 (2) DIN rail mounting . 27 4.4 Mounting . 28 (1) Mounting . 28 (2) Grounding . 29 1 No.SFOD-OMT0010-B (3) Mounting location . 30 5.

Digital Flow Switch (Remote type sensor unit)

49 35 28 16.8 2.7 depth 12 PF3W511 3/4, 1 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model 11/4, 11/2 104 74 31

MLGP

50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 5028 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 42 60 80 100 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E

MLGP

50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 5028 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 42 60 80 100 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E

Low Friction Cylinders Series MQ

TH TY TX TV TW 2 x TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

XL

Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)

C92

30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175 190 215 230 270 320 142 161 170 185 210 220 250 300 32 36 45 50 63 71 90 115 7 9 9 9 12 14 16 18 18 22 22 28 34 40 44 49 73 82.5 90 97.5 110 120 145 170 12 16 16

e

Nominal size Stroke Nominal size: 16 (74.7) (101.7) (60) (40) 80 27 70 74.7 (60) 27 44 72 Motor 5H7 depth 5 LJ1 LJ1 43.5 LG1 LG1 60 60 60 139 69 10.2 79 139 LTF LTF 87 66 80 LC1 LC1 10 7 4 LC7 LC7 28 28 2 x 2 x 9.5 counterbore depth 5.4 5.5 through hole Long hole depth 5 4 x M5 x 0.8 depth 9 T-slot section for mounting 5H7 LC8 LC8 5.6 (Max.

10

28 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 3 ( ): Denotes the Normally Open (N.O.) dimensions. 33 Series VX21/22/23 For Steam Can be used with heated water.

Sine Rodless Cylinder Series REBR Direct Mount Type

Content 15 CYR15EAbove numbers 26, 27, 28, 29, 30 25 CYR25E32 CYR32ENote 1) indicates the stroke.

High Vacuum Angle Valve, XL Series

Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

New

28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

MK

RE A B (mm) Mounting Rail mounting style Direct mounting style REC D-A7H/A80H D-A73C/A80C D-F7/F79F/J79 D-F7V/J79C D-F7BA/F7W D-J79W/F7WV D-M9 D-M9V D-F9W VD-F9W D-A79W D-A9 D-A9V D-A7/A8 D-F9BAL D-P5DWL CX Model A 28 28.5 32.5 23.5 28 28 A 28 29 33 24 28.5 28.5 B 6.5 7 6 8.5 11.5 14.5 B 7 7.5 6.5 9 12 15 A 25.5 26 30 21 25.5 25.5 B 4 4.5 3.5 6 9 13 A 19.5 24 24 B 4.5 7.5 10.5 A 31.5 22.5

CLQ

For details, refer to page 9-15-39. 9-10-28

PF-OMM0004_C

49 35 28 16.8 2.7 12 PF3W711 3/41 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W721 56 91 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78

HRX-OM-X037

(B contact). (1) (2) (3) Setting of contact output signal 1 to 3 Table 5.4-28 Setting of contact output signal 1 to 3 No.