Rotary One-touch Fittings Series KS/KX

M5, M6 Weight (g) M5, M6 D1 D2 L1 L2 A M Nylon Urethane M5 0.8 M6 1.0 KXL04-M5 KXL04-M6 KXL04-01S KXL06-M5 KXL06-M6 KXL06-01S KXL06-02S KXL08-01S KXL08-02S KXL08-03S KXL10-02S KXL10-03S KXL10-04S KXL12-03S KXL12-04S 22.5 23 24 8 11 4 10.4 13 16 2.5 3.5 3.5 22 1 8 M5 0.8 M6 1.0 12 16 24 23.5 24 25 28 29 32 33 38 39 42 40 43 25 2.5 3 3.5 5.0 3.5 5.0 8 26 15 6 12.8 15 24 17 1 8 1 4 28 20 26

Mechanical Valves Series NVM, NVFM, NVZNI

o F O F 5 73 lbs (2 6 kg) P T 0 216 in (5 5 mm) N T 0 039 in (1 mm) T T , 0 256 in (6 5 mm; A B c D E F G H J K M N 1.20 30.5' ).2, (6) 4.41 ' 1 1 2 ' 3 . 1 9 (81) 1 1 0 (28) 1.22 (31) 0.06 (1.5) 0.1: (3) 1 . 5 7 (40) 1.06 (27) 1 4 2 (36) 1 . 2 6 3.05 (77.5 Millimeters in Parentheses Millimeters in Parentheses "32) NVM430-N01-36 T U T 4 41 lbs (2 ks) T T 90' A B c D E F G H J K M N P 5.43

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 NZ L 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 36 41.6 +0.5 +0.3 +0.058 0 -0.3 -0.5 +0.058 0 44 50.6 +0.5 +0.3 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 Knuckle Pin (Also used as double clevis pin) Rod End Nut d d Dd9 C m m l L t t H B Material: Carbon

Short Stroke Electric Actuator Series LX

load m (kg) a = 1000 300 L2 (mm) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28

Miniature Guide Rod Cylinder Series MGJ

Electrical entry direction Perpendicular Perpendicular Perpendicular 3-wire Wiring type 2-wire Output type NPN PNP IC circuit, 24 VDC relay, PLC Applicable load 24 VDC relay, PLC 5, 12, 24 VDC (4.5 to 28 VDC) Power supply voltage 10 mA or less Current consumption Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA 80 mA or less 1.5 V or less (0.8

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3

Platform Cylinder Series CXT

Dimension l from the guide shaft center to the top surface of the table is indicated below. 11.4 19.3 Slide bearing 25 20 5.60 8.19 Ball bushing bearing 19.8 23.3 Slide bearing 32 30 (mm) 10.1 14.8 Ball bushing bearing l dimension 12 19.5 16 24 20 28 25 31 32 39.5 40 37.3 46.2 Slide bearing 50 Bore size 40 21.3 27.5 Ball bushing bearing 47.5 Allowable Load Only by Adjusting Bolt If only the

AIR FILTER

DISASSEMBLY DRAWING 28-29 11. DIMENSIONS 30 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Ionizer Nozzle type IZN10 Series IZS

pressure Note 4) Air purge 0.05 MPa to 0.7 MPa Note 5) Connecting tube size 6, 1/4 inch 24 VDC 10% Power supply voltage Current consumption 80 mA or less Connected to +24 VDC (ON voltage: Between +19 V and power supply voltage, OFF voltage: 0.6 V or less) Current consumption: 5 mA or less Max. load current: 40 mA Residual voltage: 1 V or less (load current at 40 mA) Max. applied voltage: 28

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

Compact manifold regulator ARM5 Series

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

BP1000

4 10 30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28

BP1000

BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material S 316L SS secondary remelt SH Wetted Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28

COQ2BP

OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

CE

28 Counter CEU5 Wiring with External Equipment 1.

Compact Hydraulic Cylinder

E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11 100 20 25 98 28

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28