Series LX Acceleration Time Guide

30 30 Transfer load Transfer load Ultimate speed (mm/s) Ultimate speed (mm/s) Ultimate speed (mm/s) Ultimate speed (mm/s) 10kg 3kg 20 20 20 Transfer load 6kg 2kg 10kg 3kg 1kg 6kg 10 10 10 0kg 0kg 3kg 0kg 0 0.01 0.02 0.03 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0.04 Time (s) Time (s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load

Series LQ3 High Purity Fluororesin Fitting

27 3/4" 77.5 41 88 49 36 30 1" Male Elbow : LQ3L-M (mm) Inch Size Model Tubing O.D.

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

5 Port Solenoid Valve SY Series

Bracket (For F1) SX 000-16-2A (with mounting screw) Bracket (For F2) Mounting screw tightening torques SY3000 (M2): 0.12 Nm SY 000 (M3): 0.6 Nm SY9000 (M4): 1.4 Nm 5 7 4 Body Ported How to Order Pilot Valve Assembly How to Order Connector Assembly for L and M Plug Connector 30 4A SY100 For DC: 5 G V111 30 1A SY100 For 100 VAC: Light/surge voltage suppressor Coil specifications 30 2A SY100

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

PSxx-OMV0003CN

<> UPDOWN[F80] SET UP DOWN SET [F80] 30 () [ECo] (ON) ON OFF -46No.PS-OMV0003CN-G [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000) /(59) [FAL] 3[nG] SET1 -47No.PS-OMV0003CN-G UP DOWN /(59 ) SET 1 () UP DOWN SET [F81] 30 -48No.PS-OMV0003CN-G [F90] <> UPDOWN[F90] SET UP DOWN [on] [oFF]() SET [oFF]() SET [F90] SET 50 UP DOWN SET2 -49No.PS-OMV0003CN-G

PSxx-OMM0002CN

[ON] 5 [oFF] [F99] -38No.PS-OMM0002CN-F / ()() 1 "Hi" 1 1 "Lo" 1 1 () 10%0 (1dight ) 1 LoC1 () < -> 5 LoCUnL () / -39No.PS-OMM0002CN-F < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 41/ [UnL] [FAL] 3[LoC] -40No.PS-OMM0002CN-F [000] <> (40)~(40) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -41No.PS-OMM0002CN-F , (1015 ) <> 5 UnLLoC 5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F

Digital Gap Checker

ISA3-H Piping length: 1m, 3m, 5m : When the display value becomes 29 or lower, "0" is displayed. "0" and "30" are displayed near "30".

Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

VXR21/22/23

Add 10 g for conduit type, 30 g for DIN terminal 60 g for conduit terminal type respectively. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential min. operating pressure differential and max. system pressure.

V

~ 75PSI 30 ~ 75 PSI Standard Supply Pressure 0.4MPa / 160PSI Hysteresis Hysteresis modo, wind comparator modo 160PSI Operating Temperature Range 5 ~ 50C / 40~120PSI 40~120 PSI Temperature Specification + -3%F.S.

NCRBIBwserbs

180 180c 270 270a X For70 PSI NC RBl BW Wiih Auto Switch Capability Mounling B Basic Body F Flange Mount Auto Switch D With auto switch capability (with switch mounting clamp assembly) Length ot Lead Wire Double End Shaft Size Torque (mm)-(inlbs) 1 0 _ 1 . 0 '15 2.65 20 _ 6.08 30 15.62 *Apdi6lo 20 and 30 boE only Nole:Crnnetor type is.ot avaitabte tor soid 3 wir6lyp.

Adsorption Plate

SP 30 1 1 Adsorption Plate Port position Refer to the table for the port position dimensions on the side. The back side port is plugged with a Tapered Screw Plug.

SYA3000/5000/7000

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 (Breathing hole) 1/4 (P port) 1.2 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8

5 Port Air Operated Valve SYA3000/5000/7000 Series

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 1/4 (P port) 1.2 (Breathing hole) 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 1/8 (EA, EB port) 2 x 2.2 die-cast hole (For manifold gasket positioning) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1470 5 Port Air Operated Valve SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position double SYA7220-(F2) C8

Shot Pin Cylinder

16 0.1 16 0.1 16 0.1 30 0.03 4 surfaces 2 x 11 4 surfaces 2 x 8 F7 Coil scraper 60 0.05 45 10 15 78 67 48 11 152 + Stroke 115 A A 60 0.03 9 30 30 Protective plate M12 connector (4 pin) 2 x 10 F7 depth 20 60 108 4 x M10 depth 20 (Helisert) 90 0 45 G, NPT1/4 19 15 15 Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

MDHR2-30 33 34 16 28 12 20 M5 x 0.8 1122112230 58 59 19 37 18 Note 1) Refer to the Best Pneumatics No. 4 for details of gripping force at each gripping point.