High Vacuum Angle Valve Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.
1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).
Supply pressure normal Supply pressure drop Supply pressure increase Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 n1 n2 Vacuum Set value n1 n2 P1 Set value P2 n1 n2 P1 P2 P2 Time Normal mode Operating normally Operating normally Operating normally ON Time Reverse mode ON OFF Time OFF Time AUTO-SHIFT terminal When the Auto Shift Function is used.
Set value Vacuum P1 P2 P1 P2 P2 Time Operating normally Operating normally Operating normally ON Normal filled pressure Insufficient filled pressure Excessive filled pressure OFF Time n1 n2 When autoshift function is used n1 n2 n1 n2 Set value 10[ms] or longer GND Disconnected Time Reverse mode ON OFF Time When autoshift function is used Autoshift terminal 10[ms] or longer GND Disconnected
1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).
(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N11 (3/8" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)
Series: 2 (10-SV2000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)
Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 10 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 3/8" One-touch Fitting, Mounting Method: DIN Rail Mounting
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø4 single-action pipe fitting (A-, B-Port) / ø10 single-action pipe fitting (P-, E-Port), Specification
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø6 single-action pipe fitting (A-, B-Port) / ø10 single-action pipe fitting (P-, E-Port), Specification
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (without DIN rail), Port pipe connection port diameter: ø6 single-action pipe fitting (A-, B-Port) / ø10 single-action pipe fitting (P-, E-Port), Specification
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (without DIN rail), Port pipe connection port diameter: ø8 single-action pipe fitting (A-, B-Port) / ø10 single-action pipe fitting (P-, E-Port), Specification
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø5/32" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø1/4" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (without DIN rail), Port pipe connection port diameter: ø1/4" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (with DIN rail), Port pipe connection port diameter: ø3/8" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification
Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: DIN rail mounting (without DIN rail), Port pipe connection port diameter: ø3/8" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)