XG_-OMV0028

12 18 2 A 16 U 17 21 23 2B 9 10B 11 9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

85.2 124.8 150.1 NX 7.3 10.5 14 PA 44 63 113 PB 80 110 132 PC 4 9.4 8.5 PP 5.3 8 16 Q 140 185 290 Model MY2HT16G MY2HT25G MY2HT40G X 7 9 12 Y 5 8 12 Z 160 210 330 U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 XX 12 14 23 "P" indicates cylinder supply ports.

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.

EXxx-OMU0020CN

SI SI -Enable / 68 No.EX-OMU0020CN . 12-2 SF LED () No. 6.2 3 LED Link Power Margin 2dB . 12-3 US LED No. 1 US1 LED SI US1(/) SI 2 US1 LED US1(/) 3 US2 LED SI US2(/) SI 4 US2 LED US2(/) 69 No.EX-OMU0020CN . 12-4 No. SI 1 US2(/) SI 12.2. EX245-DX1 . 12-5 EX245-DX1 No. / 1 / US1(/ SI / / 2 EX245-DX1 LED / / / 12.3.

CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke

MLU

3.2 4.5 4.5 5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model LT CL1 29 37 46 57 56 71 89 109 5.5 6.6 9 11 MLUL25 MLUL32 MLUL40 MLUL50 23 27 31 37 12 16 18 21 144 164 177 209.5 LS + Stroke X Y X Y LX LZ MLGC 4-LD ZZ + Stroke CNG Front flange style MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

39

13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm) PA PB PC PD R RB RR S V VA VB VC VD RA VE VF W XA XB XC 104.5 50 63 50 45 10 55 46 68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78 151 146.5 17

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

Model Selection 1

/N.O./ Double acting 0 to 0.5 Pilot pressure: 0.3 to 0.5 LVA1/2/3/4/5 2, 4, 8, 12, 20 1/8 to 3/4 Single unit Direct operated Threaded type 17-5-17 0 to 0.5 Pilot pressure: 0.3 to 0.5 N.C./N.O./ Double acting 1/4 to 3/4 4, 8, 12, 20 LLA2/3/4/5A Manifold 1/8 to 1/2 LVH2/3/40 N.C. Single unit Direct operated Manually operated 17-5-27 0 to 0.5 4, 8, 12 LLH2/3/4A 1/4 to 1/2 N.C.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

S070

3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

Compact Cylinder with Air Cushion and Lock Series RLQ

V 24 V Connector Grommet Diagnostic indication (2-color display) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Solid state switch Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Diagnostic indication (2-color display) Relay PLC 24 V Yes 12 V 5 V, 12 V 2-wire Water resistant (2-color display) Grommet IC circuit With diagnostic output (2-color display)

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

DOC1003626

Alarm 12 None 13 None 14 None Alarm given off status 0= Not occurred 1= Occurred 15 None 0 Abnormal rise in heat exchanger inlet temperature 1 Failure of circulating fluid discharge pressure sensor 2 Circulating fluid discharge pressure rise 3 Circulating fluid discharge pressure drop 4 None 5 None Alarm flag 2 6 None 7 None 8 None 9 None 10 None 11 Electric conductivity increase * 12 No

240

V Reed auto switch Solid state auto switch IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay, PLC 24 V Yes Grommet 12 V 5 V, 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9BAV1 12 V 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes 24 V Grommet A93V2 A90V A93 A90 IC circuit 100 V 100 V or less Relay, PLC 2-wire 12 V No 1 Water resistant

Modular F.R.L. Unit

Note 12) Consult P/A for detailed dimensions and available attachments and options. 21

DOC1020530

PA03 02: LEC-MR-RB-032 03: LEC-MR-RB-12 Set this parameter to enable the absolute position detection system. For details, refer to "LECSN-T Operation Manual, Chapter 12.