Manifold Type: 42 (Base Mounted), Valve Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40 (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41R (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 42 (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40 (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41R (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 42R (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 13 Stations, Port Size: 01T (NPTF1/8), Option: D (DIN Rail Mounting)

Series: 2 (VQZ200), Stations: 13 Stations, Port Size: 01T (NPTF1/8)

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 Parts included 13 Gasket 1 13 Gasket 1 13 Gasket 1 13 Gasket 1 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 Description Size 70

Compact Guide Cylinder Series MGQ

18 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 14 48 10, 20, 30, 40, 50, 75, 100 43 33 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 16 52 47 37 10 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 7 18 60 Rc1/8 NPT1/8 G1/8 G1/8 20, 30, 40, 50, 75, 100 125, 150, 175, 200 12 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 8 26 70 Rc1/8 47.5 37.5 NPT1/8 Bore size T TA TB U V W X YY YL Z S (mm) 12 16

Drain Separator for Vacuum Series AMJ 1

Effective for removing water droplets from the air sucked into vacuum pumps and ejectors, etc. 13-13-1 2 Series AMJ Precautions Be sure to read before handling. Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series.

Drain Separator for Vacuum Series AMJ

Effective for removing water droplets from the air sucked into vacuum pumps and ejectors, etc. 13-13-1 Series AMJ Precautions Be sure to read before handling. Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series.

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

30

Note 2) Value of FEP tube. 13 Series KQB2 Applicable Tube: Inch Size, Connection Thread: UNF, NPT Dimensions Female Connector: KQB2F Note 2) Effective area (mm2) Applicable tube O.D.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

In order to prevent damage due to the breakdown and 13. Radiant heat from strong heat supplies such as a furthe malfunction of the driver and its peripheral devices, a backup system should be established previously by giving a multiple-layered structure or a fail-safe design to the equipment, etc. nace, direct sunlight, etc., should not be applied to the product.

AC Servo Motor Driver (Pulse input type/Positioning type)

Programmable logic controller 2m max. ( Note 8) FX3UMT/ES (Note 13) Diver S/S Servo amplifier 24V 0V (Note 7) (Note 7) (Note 2) L CN1 CN1 24VDC PLC power (Note 4, 1 0 ) 1 DICOM 9 ALM supply RA1 Trouble (Note 6) N OPC 2 (Note 10, 12) 12 MBR Electromagnetic brake interlock RA2 13 DOCOM Y000 PP 23 23 Note1) COM1 (Note 14) 25 Note1) Y010 NP 25 10m max.

CEx-OMI0064

8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

VCC

Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668