VZA200/400

VVZ400-32A-21 pc. 5-5-1 2 Series VZA200/400 Dimensions Body ported: VZA22-P-M5 Pilot port M5 x 0.8 2-2.8 Mounting hole 2-2.8 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manual override (Non-locking) 3-M5 x 0.8 Foot bracket Body ported: VZA22-P-M5

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

Rotary Table/

3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5 3H9 3 15.5

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

125

Manifold base Port 2(A) side Port 2(A) side Internal pilot Common external pilot + + + + Blanking plate assembly VVEX2-2 (Common external pilot) Exhaust from both ends when there are 5 stations or more. 2 x M5 Common external pilot port (VVEX2-2 only) 2 x Port 3(R): 1/4 30.5 2 x 6.5 7.5 A B A B P1 P1 13.5 (For mounting) 98 88.2 11.5 27 P1 P 66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P):

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Finger opening port M5 X 0.8 Finger closing port MHZ2 25 25 MHZJ2 6-M5 X 0.8 thread depth 10 (A, B, C common view) MHQ 50 3-5 depth 10 +0.02 0 16h9 0 -0.043 (A, B, C common view) MHL2 Auto switch mounting groove 2 MHR 10 MHK 35.8 MHS 22 4.7 3.8 2-3 (76) 70 MHC2 11.5 25.5 2-4.2 MHT2 2 MHY2 5 0 -0.03 5 0 -0.03 24.5 4 12 0 -0.05 Open: 37 Closed: 19 MHW2 2-M5 X 0.8 thread depth 10 (Thread for

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5 x 0.8 thread depth 10 MDHR2-30E Port Location P .C.D.43 (Mounting thread) MHZ 80 MHF 120 MHL MHR

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

M5: 5.7) 35 5.5 53 (For top ported) Cover dia. 1.6 Cross section 0.34 mm2 39.5 7.8 42.5 P R 1 3 15 8 2-M5 x 0.8 PE port 13.4 2-Rc 1/8 Port 3(R) 16.3 41.2 2-Rc 1/8 1(P) port 46.5 The broken lines indicate the DIN rail mounting style [-D].

Auto Switch Guide

x 0.8 x 20 CC M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C RB D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland J D-X G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 20Hexagon socket head cap bolt Hexagon socket head cap bolt Data Indicator light Most sensitive

5 Port Solenoid Valve SY Series

38 1 2 1 2 1 4 1 8 M5 Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) DIN External Pilot (Note 2) External Pilot (Note 2) terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 Sub-plate External pilot External pilot DIN External pilot terminal M8 SY9 40 connector Note 1) All AC voltage models have built-in surge voltage suppressor.

MHY2/MHW2

9 Seal Kit NBR MHW20-PS MHW25-PS MHW32-PS MHW40-PS MHW50-PS 2.8-18 180 Angular Gripper Series MHW2 Dimensions MHW2-20D Flat finger (Standard) 20 2-M5 X 0.8 Depth 7 (Mounting thread) 17 60 4-M5 X 0.8 Depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2-M5 X 0.8 Depth 10 (Mounting thread) 35 23 27 36 26 18 23 7 21H9 +0.052 Depth 3 0 MHZ2 +0.2 +0.1 12 2 16 36 26 MHZJ2

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

3 Port Solenoid Valve Rubber Seal Series SY100 1

x 0.5 SS3Y1-31 M5 x 0.8 M3 x 0.5 SS3Y1-S41 M5 x 0.8 M5 x 0.8 Note) Value at manifold base mounted How to Order Valve Manifold Assembly Example Stations3 2 1 Valve (N.C.)

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

19 1.5 4-M5 x 0.8 Prepared hole dia. 4.2 4-M4 x 0.7 depth 4.5 Piping port 2-M5 x 0.8 (Plug: M-5P) 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting reference planes B D 12 9.5 Section AA MXP12-25B Without magnet and switch rail 2-M2 x 0.4 depth 3 For magnet mounting 8 2-M3 x 0.5 depth 3.5 For rail mounting 5.7 3.5 6-M4 x 0.7 depth 4.5 20 20 L (mm) L K MA V J S Z H M W Model

Rotary Gripper Series MRHQ

x 0.5 M5 x 0.8 14.6 closed (mounting screw attachment ) Finger closing port 4 15 3 Max. 7.3 7 +0.03 0 3-4H9 42 78 Depth 6 (one each on three sides) 22.5 M5 x 0.8 Finger opening port 3-R2 29 15 16 10 22 8 31 51.5 18 40 Angle adjustment bolt 6 2-5.5 through 4-M5 x 0.8 3-R2 2-9.5 depth of counter bore 3 Depth 8 (two on opposite side) 11 2 10 +0.03 0 3-4H9 long groove depth 4 M5 x 0.8 Port A

51

2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1/8 Width across flats 10 length 3.5 Up to

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

CLQ

x 0.8 Front cylinder port VH Q 2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port