Flow Sensor Series PFMV

P1 P2 P1 P2 Vacuum source (Vacuum pump) Nozzle Nozzle Note) Since the calculated value may not meet the approximate value due to leakage and pressure loss in the piping system, please check the result by using actual equipment. 950 Flow Sensor Series PFMV5 How to Order PFMV5 05 1 Option (shipped together) Measurement flow range 05 10 30 05F 10F 30F Nil 0.0 to 0.5 l/min None With L-type bracket

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05

CE2

NT-04 NT-05 NT-08 NT-10 M14 x 1.5 8 22 25.4 21 CX 11 27 31.2 26 M18 x 1.5 13 32 37.0 31 M22 x 1.5 CY 16 41 47.3 39 M26 x 1.5 MQQ M Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the proper allowable kinetic energy. It must not be operated out of the allowable range, which is shown in the graph on the right.

Brake mechanism added

Applicable bore size d H B C D E1 C H NX B A L1 A1 U1 I-04A 40 69 22 24 55 M14 x 1.5 15.5 20 12+0.070 0 16 0.1 0.3 I-05A 50, 63 74 27 28 60 M18 x 1.5 15.5 20 12+0.070 0 16 0.1 0.3 I-08A 80 91 37 36 71 M22 x 1.5 22.5 26 18+0.070 0 28 0.1 0.3 I-10A 100 105 37 40 83 M26 x 1.5 24.5 28 20+0.084 0 30 0.1 0.3 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5 11 27 31.2 26 NT-08 80 M22 x 1.5

ISO Standard Hydraulic Cylinder

Size BTAuto switch mounting screws 1 1 M4 x 0.7 x 8L D-A5, A6 D-F5, J5 DBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 D-Z7, Z8 D-Y5, Y6, Y7 2 2 M4 x 0.7 x 6L Set screw BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 D-Z7, Z8 D-Y5, Y6, Y7 BS4-125, BS4-160 BS4-180, BS4-200 3 2 M4 x 0.7 x 8L Set screw D-A9 D-M9 BS5

Cylinder with Lock

Auto switch model Bore size [mm] 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 D-A3/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-A5/A6/A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10-063S D-P4DW BMB3T-040 BMB3T

Manifold Specifications

Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19. 13-6-2 Vacuum Ejector In-line Type Series ZU How to Order ZX ZU 05 S ZR ZU07 ZM Maximum vacuum pressure S 85 kPa ZH L 48 kPa ZU05 ZU Nozzle diameter 05 0.5 mm ZL 07 0.7 mm Circuit diagram ZY EXE ZQ Specifications

Clean Regulator/Fluororesin Type

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 04 06 08 10 12 19 03 05 07 11 13 19 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

CE2

to 850 25 to 700 Up to 1200 Up to 950 MVGQ 50 25 to 800 25 to 650 Up to 1150 Up to 900 BT-04 BT-04 BT-06 BT-08 BT-08 63 CC 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 RB 100 25 to 750 25 to 600 Up to 1100 Up to 850 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M (kg) Weight J 40 50 63 80 100 Bore size (mm) DBasic style 2.18 3.39 5.29 8.66 12.09 BA-04 BA-05

Body Size: 05 (400 L/min. 14.1 scfm), Thread Type: Body Size 05: M Thread; Body Size 10-40 R Thread, Port Size: M5 (M5 x 0.8)

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 12 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 61 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 61 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 51 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 51 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors MECHANICAL VALVE. MECHANICAL VALVE. 45.00000 lb. I98.

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors MECHANICAL VALVE. MECHANICAL VALVE. 46.00000 lb. I98.

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 26 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 26 lb