Rotary Cylinder Series MRQ

1 !2 !3 !4 !5 !6 !7 !8 !

Vacuum Ejector Series ZM

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

FREE MOUNT CYLINDER

J Non-lube Lubrication Note 1) Double-side Rubber bumper Bumper Double-side rubber bumper +1. 0 0 0.8 0.5 Stroke length tolerance Note 2) Non-rotating accuracy of the rod Allowable rotational torque(Nm) 0. 0015 0. 02 0. 04 0. 10 0. 15 0. 20 Reed auto switch D-A9* Solid state auto switch D-M9* Auto switch(Option) Note 1) For the 6 single-acting spring extended type (CDU(K)6*T), only the

Compact Cylinder with Air Cushion Series RQ

8 9 28 7 57 14 1/8 31.5 8 71 19 11 1/4 Refer to page 784 for details on rod end nut and accessories.

Digital Flow Switch ( compatible)

(page 88) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Digital Flow Switch ( compatible)

(page 84) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled. Contact SMC when replacing component parts.

VVX31/32/33

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

LECA6_C

I/O ()1 I/O (8 ) 64 / I/O 12 6 - 2.2.

mlu

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

E-MY2B_E_A

Travel to intermediate position 1 Press within 3s after pressing . Travel to intermediate position 2 Press within 3s after pressing . Travel to intermediate position 3 30 6.Setting of speed and acceleration General 3 positions 5 positions General 6-1 Setting of speed By adjustment of switch and , the speed of actuator is set.

PFxx-OMX0002

1: The air quality class is according to JIS B 8392-1:2012 [3:6:-] and ISO8573-1:2010 [3:6:-]. 2: When using the accumulated value hold function, calculate the product life from the operating conditions, and use the product within its life.

CG1-OM0227

24. 1) 2) 3) 1) 2) 1.5~2 2 2. 2-5. ,AS 8 2-6. 2-6-1.

PFxx-OMX0007

s/2 s/5 s -52No.PF-OMX0007-A 1: The air quality class is according to JIS B 8392-1:2012 [4:6:-] and ISO8573-1:2010 [4:6:-]. 2: When using the accumulated value hold function, calculate the product life from the operating conditions, and use the product within its life.

RQ

For detailed specifications, refer to page 7-9-1.

E-MY2_E_D

Travel to intermediate position 1 Press within 3s after pressing . Travel to intermediate position 2 Press within 3s after pressing . Travel to intermediate position 3 30 6.Setting of speed and acceleration General 3 positions 5 positions General 6-1 Setting of speed By adjustment of switch and , the speed of actuator is set.

IZx-OMR0035

Function 4-1. Name of Parts 8 1 2 3 4 5 6 7 No. Name Panel display Type Description 1 Power supply switch POWER Switch Turn the Ionizer on and off.

VFR2000 Series

Connection of fittings When screwing fittings into valves, tighten as follows. 1) M5 After tightening the fitting by hand, use a wrench to tighten the fitting an additional approximately 1/6 to 1/4 turn. As a reference value, tightening torque is 1 to 1.5 Nm. Note) If tightened excessively, the thread of the product may break or the gasket may deform.