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Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -51NO.ZL3-OM00701-A Error No.

IDF100150F 1 5 IDX-OM-U021 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 6 IDX-OM-U021 2 2 2-1 45 45 45 2-1 IDF100150F 2 1 IDX-OM-U021 2 2-2 2-2-1 (1) (85%) () B C 245050 () 2000m ) (2) 2-2 IDF100150F 2 2 IDX-OM-U021 2 2-2-2 P.6-2 6.3 IDF-AB501 14

Power supply cable: 3.5mm2(12AWG) or larger, Cable outside diameter Approx. 14 to 18mm, 4 cores (including ground) Approx. 0.6m is necessary to route the internal wiring of the product. Power supply cable length The power supply cable length from the product should be less than 30m. Terminal block (refer to 1.3 Name and function of parts for details).

IDF100150F-W 1 5 IDX-OM-Z004 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm M3 6.5mm 1.25mm 2 2 1.3 IDF100150F-W 1 6 IDX-OM-Z004 2 2 2.1 45 45 45 IDF100150F-W 2.1 2 1 IDX-OM-Z004 2 2.2 2.2.1 (1) (85%) () C 245050 () 2000m ) (2) IDF100150F-W 2.2 2 2 IDX-OM-Z004 2 2.2.2 P.6-3 6.3 IDF-AB501 14

psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg]) 27[F 0] -39No.PS-OMM0006CN-E [F80] 30 <> [F80] 1 2 [F80] 1 OFF 1 2 30 () 2(ON) ON OFF -40No.PS-OMM0006CN-E [F81] <> [F81] [F81] 000 50 -41No.PS-OMM0006CN-E [F90] <> [F90] [on]() 1 [oFF] () [oFF]() 2 [F90] 1 43 -42No.PS-OMM0006CN-E 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 -N-P 9 OUT2 10 OUT2 11 12 13 / / 14

No.PS-OMH0002CN-D / / / / / / / / ISE70 ISE75(H) 2 8 9 10 13 13 13 14 16 16 21 23 25 26 34 34 36 -1No.PS-OMH0002CN-D (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO

SI PWR LED DC24 V10% 14 SI PWR LED DC24 V10 PLC -51No.EX-OMN0027CN-D EX600 /PLC H.T.PLC H.T. H.T.PLC PROFIBUS H.T.PROFIBUS PLC No. (H.T. PLC H.T. ) SI OFF/ SI H.T. Switch Hold/Clear (Hold/Clear) 1 H.T. OFF// ON Handheld No.diag. Device diag. + (70 ) 2 (Diag.mode) Device + Module diag. ++ Device + Module + Channel diag. +++ -52No.EX-OMN0027CN-D SI No. (H.T.

MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3 ) 5 6 LED SI 2 7 SI (M330) SI 2 (BUS OUT)(1 ) 128 2LED 16 -9No.EX-OMP0004CN-I SI n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 L 9 10 11 12 13 14

14 2 x 3.4 (Through holes for mounting) 17 37.4 11.5 2 x M3 x 0.5 (Pilot port) 32.5 + Stroke 34 + Stroke 31.5 7.7 11.5 23 24.5 + Stroke 16.3 + Stroke 14.4 23 (37.4) 2 x M3 x 0.5 depth 2.5 1.5 8 +0.1 6 0 depth 2.5 Auto switch 14 MXZ12R(Pilot port location: Right) MXZ12L(Pilot port location: Left) 2 x M3 x 0.5 (Pilot port) 2 x M3 x 0.5 (Pilot port) 16.3 + Stroke 16.3 + Stroke 7.7 7.7 Auto

consumption: 1 w 3 Manual override options added Locking slotted type Push-turn locking slotted type Push-turn locking lever type VEX VEX For Grommet/Plug connector For DIN terminal For DIN terminal Variations Flow rate characteristics *1 Applicable cylinder *2 Body size Port size C [dm3/(sbar)] 63 80 100 125 VEX312 1/4 3.5 Body ported VEX332 3/8 8.7 Base mounted VEX322 1/4 4.4 VEX342 1/2 14

03 38 04 12 D I M E N S I O N S S E R I E S (N)ASN H Hexagonal Width Port Size Model D Min Max Across Flats 20.5 23.3 8 M5x0.8 (N)ASN2-M5 10 30 34 14 1/8 (N)ASN2-01 15 34.2 38.2 17 1/4 (N)ASN2-02 20 37 41 21 3/8 (N)ASN2-03 25 49 55 24 1/2 (N)ASN2-04 30 y, South San Francisco, CA 94080-6370 !

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

PneuAlpha Series Terminal Layout. 19 4.1 Installation Wiring Notes . 13 4.2 Wire Size and Specifications . 13 4.3 Power Supply. 14 4.4 Recommended Power Input Wiring Diagram. 14 4.5 AC Input Wiring. 15 4.5.1 AC Input Wiring Diagram. 15 4.6 Wiring Diagrams for the Sink/Source Terminals . 16 4.6.1 Source (+ Common) Input Wiring Diagram. 16 4.6.2 Sink ("-" Common) Input Wiring Diagram . 16 4.7

Refer to pages 14-21-3 and 14-214 for Safety Instructions and Common Precautions. Piping Warning Port size 1. When making drain exhaust piping, use piping with bore size 8 or larger than 8. Length should be shorter than 5 m. Do NOT pipe upwards.

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-111 to 16-1-13 for Precautions on every series.

VCA20/30/40 Single unit Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17-2-14 VV2CA2/3/4 Manifold N.C. VCB20/30/40 17-2-24 Single unit N.C. 17-2-32 VCL20/30/40 N.C. Single unit VV2CL2/3/4 17-2-36 N.C.

Please consult with SMC regarding other voltages. 17-2-14 9 Series VCA Direct Operated 2 Port Solenoid Valve For Air How to Order Manifold (VCA30/40) How to Order Manifold Assembly VV2C A 02 3 Enter the mounting valve and option part numbers under the manifold base part number. For air VV2CA3-05 VCA35-5G-4-03 1 set Manifold part no. 5 sets Valve part no.

ZF Flat with ribs (C) Flat style (U) ZP ZP02Ul to 08Ul ZP10Cl to 50Cl ZCU Vacuum related Model Nom.size C10 A 10 B 12 C 4 D 13 E 7.7 F 12 Y 1.7 ZP10Cl ZP13Cl ZP16Cl ZP20Cl ZP25Cl ZP32Cl ZP40Cl ZP50Cl C13 13 15 4 13 7.7 12 1.8 ZP10Ul to 50Ul C16 16 18 4 13 8.2 12.5 1.2 C20 20 23 4 15 9.5 14 1.7 C25 25 28 4 15 9.5 14 1.8 C32 32 35 4 15 10 14.5 2.3 C40 40 43 7 18 13.7 18.5 3.3 C50 50 53 7 18