CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Rotary Table/Vane Style Series MSU

MSUB7 (Single vane/Double vane) MSUB7-S/D Top ported: MSUB7-SE A port B port 4 x M4 x 0.7 depth 7 2 x M5 x 0.8 2 x 5.5 through Single vane 2 x M5 x 0.8 depth 10 Long groove depth 5 (Positioning pin hole) 2 x 5.5 through 3 x 4H9 depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2 x 5.5 through A port B port 2 x M5 x 0.8 2 x M5 x 0.8 depth 10 Chamfer Chamfer (Single vane

SZ3000

Flow Characteristics Port size Flow characteristics 1 2/4 (P A/B) 4/2 3 (A/B R) 1, 5, 3 4, 2 C [dm3/(sbar)] Cv b C [dm3/(sbar)] (P , EA, EB) (A, B) Cv b C4 0.14 [0.13] 0.26 [0.36] 0.58 [0.49] 0.18 [0.15] 0.15 [0.20] 0.76 [0.65] C8 C6 0.18 [0.16] 0.24 [0.27] 0.73 [0.64] 0.19 [0.19] 0.19 [0.16] 0.77 [0.74] M5 0.17 [0.15] 0.38 [0.35] 0.60 [0.57] 0.16 [0.16] 0.16 [0.39] 0.67 [0.58] Note)

SZ3000

Flow Characteristics Port size Flow characteristics 1 2/4 (P A/B) 4/2 3 (A/B R) 1, 5, 3 4, 2 C [dm3/(sbar)] Cv b C [dm3/(sbar)] (P , EA, EB) (A, B) Cv b C4 0.14 [0.13] 0.26 [0.36] 0.58 [0.49] 0.18 [0.15] 0.15 [0.20] 0.76 [0.65] C8 C6 0.18 [0.16] 0.24 [0.27] 0.73 [0.64] 0.19 [0.19] 0.19 [0.16] 0.77 [0.74] M5 0.17 [0.15] 0.38 [0.35] 0.60 [0.57] 0.16 [0.16] 0.16 [0.39] 0.67 [0.58] Note)

Compact Cylinder with Lock Series CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Modular Type Regulators Series AR

40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8

CLQ

D Model C D Model C D Model C D Mounting bolt Mounting bolt Mounting bolt Mounting bolt 20CDLQB20-5D CDLQB32-10D CDLQB50-10D CDLQB80-10D 65 70 75 80 85 90 95 100 105 110 70 75 80 85 90 95 100 105 110 115 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105

SYA3000/5000/7000

Model/Series SYA540 (Base mounted) Valve model Port size Flow characteristics Note 1) Type of actuation Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Mass Note 2) (g) Cv b Cv C [dm3/(sbar)] C [dm3/(sbar)] 105 (42) 110 (47) Single Double Closed center 2 position 2.4 0.41 0.64 2.8 0.29 0.66 SYA540-02 M5 x 0.8 1 4 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8 0.33 [0.48] 0.40 0.72 [0.37] 0.47

5 Port Air Operated Valve SYA3000/5000/7000 Series

VTA Model/SYA540 Series (Base mounted) VGA Valve model Port size Flow rate characteristics Note 1) Type of actuation Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Weight Note 2) (g) VPA C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv 105 (42) 110 (47) Single Double Closed center 2 position 2.4 0.41 0.64 2.8 0.29 0.66 VPA3 SYA540-02 M5 x 0.8 1 4 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8 0.33 [0.48

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Rotary Table/

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

+0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the

Silencer Series AN

Make sure to verify the operating conditions of the actuator at least once a day. 5-10-13 5.34 AIR PREPARATION: ACCESSORIES SILENCERS SERIES (N)AN SERIES (N)AN SILENCER M3, M5, 18 SINTERED BRONZE Suitable for miniature valves and pilot air exhaust ports 13 21 dB noise reduction H O W T O O R D E R SERIES NAN SILENCER T E C H N I C A L SPECIFICATIONS NAN120-M3 (M3) NAN120-M5 (M5) NAN110-N01

Rotary One-touch Fittings Series KS/KX

(inch) Thread UNF NPT UNF, M5, M6 10-32 UNF, M5, M6 Weight (g) H (Hex.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VS VFN C6: One-touch fitting for 6 VVQZ200-10A-5 4-14-35 Base Mounted 36 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ15Stations Port size C Grommet (G) (35) 27.5 (11) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3, C4, C6, M5 (5.5) 2-4.5 mounting hole 20 (7.5) (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Manual override 5.5 A 2 A 2 5

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra