VZ1000

r VZ1000-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Support Guide/11-LEFG Series

L Basic static rated load 8350 13900 22000 34500 LEJ LEL Table Accuracy LEM LEY A side B side LES LEPY LEPS q 0.08 C side LER w LEFG32 (L = 30 mm) Displacement [mm] 0.06 LEFG25 (L = 25 mm) D side LEH LEFG16 (L = 20 mm) 0.04 LEY -X5 Model Traveling parallelism [mm] (Every 300 mm) LEFG40 (L = 37 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side 11LEFS 0.02

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Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

IZS30_eng

T Tungsten 3. Specifications 3-1.

ChemicalThermo-con

Heat Exchanger Specifications HED003-HW13 HED003-HW19 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 Heat exchanger model Cooling capacity (Water) Note 1) 500 W 300 W 750 W Heating capacity (Water) Note 1) 1000 W 600 W 1800 W Cooling/Heating method Peltier device (Thermoelectric device, Thermo-module) Radiating method Water-cooled Operating temperature range 50 to 140F (10 to 60C) (depending

AIR COMBINATION

Press the push button to exhaust the condensate of the C3SF(-W)-A and C4SF(-W)-A. Check the element periodically and replace it with a new one if necessary. If it is found that outlet pressure drops or the flow is restricted, check the condition of the element. The manual exhaust for emergency case can be performed by counterclockwise rotation of the handle in AD17-A and AD27-A.

Compact Guide Cylinder

R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported

Dual Speed Controller with One-touch Fitting Series ASD 1

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

ASD

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

Process Valve

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) DC 12 (P1) 10 (P2) 12 (P1) Allowable voltage fluctuation SGC 50C or less (When rated voltage is applied.)

Digital Flow Switch (Remote type sensor unit)

Liquid leakage. -21No.PF-OMO0014-D Specification Specifications Model PF2W504(T) PF2W520(T) PF2W540(T) PF2W511 Applicable fluid water and ethylene glycol solution 50% (viscosity of 3 mPas (3cP) or less) 1 0 to 50 C Fluid temperature Without T: 0 to 50 C (no condensation or freezing) (no condensation With T: 0 to 90 C (no condensation or freezing) or freezing) Flow Rated flow range 0.5 to

70pvvna

Description Note Platinum silver painted Material Aluminum alloy TI/ TIL Cover assembly Body q Platinum silver painted Valve material (NBR, FKM, EPR) Valve material (NBR, FKM, EPR) Aluminum alloy Aluminum alloy w e PA Note) Plate assembly Valve element Note) Aluminum alloy r Piston assembly Travel spring Return spring Pilot solenoid valve t Aluminum alloy PAX Stainless steel y u i Piano wire

Plug-in/Plug Lead: Single Unit

(0.1 to 0.7 MPa) Note) Port size External pilot pressure range 0.15 to 1.0 MPa (0.15 to 0.7 MPa) Double Thread type Nil N T F Rc NPT NPTF G 0.15 to 1.0 MPa (0.15 to 0.7 MPa) 0.2 to 1.0 MPa (0.2 to 0.7 MPa) 3 position Note ) Values inside ( ) denote the low wattage (0.5 W) specifications. 2-6-39 Series VQ5000 Construction Plug Lead Unit Metal seal Rubber seal type e q w q w e VQC SQ VQ0 VQ4

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

A pressure drop can be verified with the type with a clogging checker (-T) or with the type with a pressure differential gauge (Made to Order). w When the element has reached its replacement interval, replace it immediately with a new element. Replace the O-ring, the gasket, and the element with new parts.

PF2A/PF2W

Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Component Parts Material ADC NBR PBT Stainless steel PBT PBT No. q w e r t y Description Attachment Seal Spacer Mesh Body Sensor Flow direction Operating Unit Descriptions Connectors Connectors shown below are applicable (female contact).

VCB

Made to Order Specifications Oil-free specifications VCB X10 17-2-25 6 Series VCB Construction q w e r Component Parts t Material Description No.

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Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.

NAIV

241 4.86 (123.5) (5s) lz3;.(1s) (20) nm2[ , t % 7.62 6.8i] 4!

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

4 y r t !3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

MHY2/MHW2

8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !