High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Motor output [W]/Size [mm] 100/40 200/60 Motor type AC servo motor (100/200 VAC) Electric specifications Encoder Motor type S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power consumption [W] Note 7) Horizontal 65 80 Vertical 165 235 Standby power consumption when operating [W] Note 8) Horizontal 2 2 Vertical

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

DC (17 mA), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

LG1H

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Clean Air Module

Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.

NCA1

+ Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MM KK E A AA B BA C D EA EE F W FB G J R TF UF WF Y P ZB LF Bore size (in) 150

NCA1

+ Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 MB LF ZB P Y WF UF TF R J G FB W F EE EA D C BA B AA A KK MM E Bore size (in) 150 (1.5") 3 5/8 4 3/4 2.36 1.71 1 3 3/8 2 3/4 1.43 1.1 1.26 5/16 5/8 3/8 3/8 0.3 9/16 3/8 1 1/8 1 1/8 2.02 3/4 7/16-20 5/8 2 MB1 200 (2") 3 5/8 4 3/4 2.4 1.71 1 4 1/8 3 3/8 1.84

3 Port Solenoid Valve Series VQ100 1

(21 mA) 1 W (42 mA) 1.5 W (63 mA) 1 (P) 3 (R) DC VKF Grommet Plug-in, L plug connector, M plug connector (With light/surge voltage suppressor) Electrical entry Normally open VQZ (A) 2 Note 1) Based on JIS B 8374-1993.

Fluoropolymer Tubing Variations

P.506 P.509 KR KA KQG2 KG KFG2 MS KKA Series TL/TIL TD/TID TH/TIH TLM/TILM KP Super PFA FEP Modified PTFE PFA Material Chemical resistance LQ 260C 260C 200C 260C Heat resistance Flexibility MQR Ion elution T T Internal smoothness Air, Water, Inert gas Chemicals, Deionized water Chemicals, Deionized water Fluid IDK 4 to 19 4 to 12 4 to 12 2 to 25 Tubing O.D.

70astamb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.

mb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

CS1

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

MLGC

e r t y u i o !

MLGC

e r t y u i o !

25

Process Pump (Diaphragm Pump) PB Series Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids o t p m s l a i PA z P e Built-in solenoid valve only RoHS Smaller, lighter, 25% reduction in volume Smaller, lighter, 25% reduction in volume

Air Cylinder NCX2 Series Slide Unit

D-A80C D-F7NTL, D-F7NV, D-F79 (sorid state type) t : I Bne @ Black lfihitel Latch ire dEonosl c oLnoul Or:nqdibuei (whi1e) O Bue tbtacb a O Blue (black) D-J79. D-J79C. D-F7BV D-F7BAL, D-J79W D.A72,D-A72H B i r w n l 8 t u w n (Black) D.F7PW D-E80A D-E73A (Black) o Reed swil.h o e Beed swltch Brue :Ei*" lblack) ked) D.A76H.

High Speed Pilot Operated

Description Material 1 Body Aluminum die-casted 2 (B) 4 (A) 2 Spool assembly Aluminum/FKM e 3 Plug (For the -X1) Steel 1 High Speed Pilot Operated Solenoid Valve DXT1215 Series How to Order Valves DXT1215 T 5 Wm U 01 N X1 w y e r t u q q Coil type w Rated voltage e Electrical entry M8 connector1 T With power-saving circuit 5 24 VDC Wm WO With straight connector cable Without connector cable