Two Hand Control Valve

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Compact and

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Fluid Compatibility Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone Hydrogen peroxide Concentration 50% or less 50C or less Ethyl acetate Butyl acetate Nitric acid (except fuming nitric acid) Concentration 10% or less Deionized water Sodium hydroxide Ultra deionized water Toluene Hydrofluoric acid Concentration 50% or less Sulfuric acid

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)

Bearing Style: Ball Bushing Bearing, Bore Size: 63mm, Port Thread: Rc, Stroke: 50mm, Table Turn Position: 90° Rotation, 4 Detector Arms (a,b,c,d), Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Bearing Style: Slide Bearing, Bore Size: 63mm, Port Thread: Rc, Stroke: 50mm, Table Turn Position: 90° Rotation, 4 Detector Arms (a,b,c,d), Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Bearing Style: Slide Bearing, Bore Size: 63mm, Port Thread: NPT, Stroke: 50mm, Table Turn Position: 90° Rotation, 4 Detector Arms (a,b,c,d), Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 25mm, Port Type: TN (NPT: 25 & 32mm Bore), Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 32mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 50mm

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 50mm

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet, Port thread type: G, Auto Switches: Without