Rotary Actuator/Vane Type

bumper With auto switch (WJ shaft) Variations With angle adjuster (WJ shaft) With auto switch and angle adjuster (WJ shaft) Option Mounting With flange F Pattern Shaft pattern Made to Order Rotating angle pattern The CRB series only 50 C O N T E N T S Rotary Actuator/Vane Type CRB2 Series CRB2 CRB2 CRB1 V Rotary Actuator/Vane Type CRB2 Series MSU How to Order Page 52 CRJ Specifications Page 53

High Power Cylinder:

GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5 61.5 B 32 36 44 53

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

5 Port Air Operated Valve Series SYA3000/5000/7000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 5 16" One-touch fitting for VR F2 With side bracket Series One-touch

5 Port Air Operated Valve Series SYA3000/5000/7000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 5 16" One-touch fitting for VR F2 With side bracket Series One-touch

E-P HYREG ® Series VY1 1

VY1A00 1, VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply (P to A) valve of valve y and the exhaust (A to R) valve close due to the balance between actuating forces F1 and F2.

E-P HYREG ® Series VY1

VY1A00 1, VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply (P to A) valve of valve y and the exhaust (A to R) valve close due to the balance between actuating forces F1 and F2.

E-P HYREG

VEX SRH VY1A00 1 , VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply [1(P) to 2(A)] valve of valve y and the exhaust [2(A) to 3(R)] valve close due to the balance between actuating forces F1 and F2.

HRX-OM-R016

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure

HRX-OM-O021

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [

HRX-OM-R005

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [

JXCx-OMU0026

(Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode. Acceleration 1 to Max ACC/DEC in the basic parameters Set the deceleration from travel speed to stop. (Unit:mm/s2) Refer to (1) to (5) on page 53 for deceleration speed setting for movement mode.

LEC-OM034xx

Electric actuators/Common precautions .49 15.1 Design and selection .49 15.2 Mounting.50 15.3 Handling.51 15.4 Operating environment .52 2 - 15.5 Maintenance .53 15.6 Precautions for actuator with lock.53 16.

JXCx-OMT0002

JXC-OMT0002-C Description Input range Explanation Stroke (-) to Stroke (+) in the basic parameters Set the target position (Unit: mm) Refer to (1) to (5) on page 53 for position setting for movement mode. Position Set the acceleration to reach to travel speed. (Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode.

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Guide Cylinder/Compact Type Series MGC

32 135 35 60 80 50 32 75, 100, 125, 150 200, 250, 300 MGT 125 107 19 16 160 176 110 125 9 12 85 165 M8 37 160 40 70 95 60 38 150 142 25 19 190 210 115 135 11 12 95 200 M10 42 194 45 82.5 115 75 50 Bore size (mm) P Note 2) Q R S T U V W WH X Y Z O 20 25 32 40 50 86 80 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153 25 M6 x 1 1/8 21 12 38 16 112 53