With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

HRX-OM-W038

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure

JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3

JXCx-OMT0030CN

166 . 53 167 . 53 3 - LEC-G Series/ 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:

MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

KJ

inch) Connection thread UNF NPT Min. port size D Note) Weight (g) Model L1 L2 M KQ2F01-34 KQ2F01-35 KQ2F03-34 KQ2F03-35 KQ2F07-34 KQ2F07-35 KQ2F07-36 KQ2F09-34 KQ2F09-35 KQ2F09-36 KQ2F11-35 KQ2F11-36 KQ2F11-37 KQ2F13-36 KQ2F13-37 1 8 1 8 26.5 30.5 27 31 27.5 31 33.5 29 32.5 34.5 34.5 36.5 40.5 36.5 41 11.5 14.5 11 13.5 10.5 13.5 15.5 10.5 13.5 13 16 26 15 24 17 25 44 18 26 38 30 48 52 48 53

Modular Type Regulator Series AR

53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2

Pneumatic Transfer System Series MF

Replacement parts: Seal kits Contents A set of above Nos. 53 through 58 Bore size (mm) 32 Seal kit No.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ235 Rubber 12.6 (0.7) 15 or less 20 or less 53 VQZ200 VQZ225 Metal 10.0 (0.55) 14 or less 18 or less N.O. VQZ245 Rubber 12.6 (0.7) 15 or less 20 or less VQZ315 Metal 16.2 (0.9) 17 or less 22 or less N.C. VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 2 13 16 49 16 18 32 35 ZPT 40/50 F-B5-A14 (Without Buffer/Male Thread) M14 x 1 Width across flats 19 M5 x 0.8 5 5 20 D 5 F Width across flats 21 C Y 2.5 A B Dimensions A (mm) B C D F Y Model ZPT40F-B5-A14 40 43 12.5 18.5 51.5 5 ZPT50F-B5-A14 50 53

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3 8 (10A) 6 1.1 26 8 1.6 38 10 0.5 2.2 53 1 2 (15A) 10 2.2 53 Note) Weight of grommet type. Add 60 g for conduit terminal type.

Ejector Valve Unit Series ZYY/ZYX 1

Note 1) Note 2) Nil 1 None With silencer Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 0.7 mm 1.0 mm 07 10 13-8-4 5 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 Lead wire/ Voltage suppressor specifications Plug-in type Serial transmission type LOZ

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube Diameter:

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube Diameter:

Series: 5 (SY5000), Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: D (Push-turn Locking Slotted Style), A,B Port Thread: C8 (Body Ported ø8 One-touch

Series: 5 (SY5000), Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch

Series: 5 (SY5000), Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting)

Speed Controller with Indicator

7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-06 (S) 6 11.2 19 33.8 21.4 43.9 14.2 26 AS231FS1-02-08 (S) 8 13.2 34.9 23.5 46 15.6 27 AS231FS1-02-10 (S) 10 15.9 20.9 38.1 24.7 47.3 17 28 AS331FS1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 21.5 16.2 49 AS331FS1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FS1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5 15.6 53

Vacuum Pad

Suction flow rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).