OMR0031

Operation Examples and Procedures. 51 12.1 Return to origin example . 51 12.2 Positioning operation example. 52 3 - 12.3 Pushing operation example . 53 13.

ZQ-OM01401

2) 44 (35) 46 (41) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22

Air Suction Filter With One-touch Fittings

Operating and ambient temperature range 0oC to 60oC No freezing Filtration accuracy 30m Filtration efficiency 95% Element replacement differential pressure 20kPa Applicable tubing material Nylon/Soft Nylon/Polyurethane Note) Alcohol, acetone, etc. also cause damage, so be sure for the product not to be close to them 2-3 Dimensions Size Model A B C D E F G H I J K L M N ZFB100-04 53 4 ZFB100

Micro Mist Separator

Dimensions (Port size) Semi-standard specifications With element service indicator Clearance for maintenance Optional specifications With auto Standard specifications Model Bracket mount drain P A B C D E G J M N Q R S T U V B AFD20-D 1/8, 1/4 40 87.6 17.5 21 45 21 30 27 22 5.4 8.4 60 2.3 28 104.9 AFD30-D 1/4, 3/8 53 115.4 21.5 26.5 30 50 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AFD40-D 1/4,

Common Supply Regulator

35.5 35.5 M42X1.5 40.5 0 14.5 42.5 78 42.5 78 42.5 78 Optional specifications Optional specifications Square embedded type pressure gauge Right angle square type pressure gauge Digital pressure switch Bracket mount Panel mountNote 2) Model H J H J H J M N Q R S T U V W Y Z AR20M-D 28 27 28 54.3 27.8 37.5 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30M-D 28 33 28 59.8 27.8 43 41 40 46 6.5 8 53

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

High-precision Digital Pressure Switch ( compatible)

information selection function 28 F 1 Setting of OUT1 30 F 2 Setting of OUT2 33 F 3 Digital filter setting 35 F 4 Auto-preset function 36 F 6 Fine adjustment of display value 38 F10 Sub display setting 39 F11 Display resolution setting 45 F14 Zero cut-off setting 46 F80 Power saving mode 47 F81 Security code 48 F90 Setting of all functions 50 F96 Number of pressurizing error 52 F98 Output check 53

Air Preparation Equipment

Number of arranged elements 4 7 9 18 22 Symbol Number of arranged elements 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

MHC Note) Width at opening (mm) L2 Model Bore size (mm) Width at closing (mm) L1 Effective gripping force per finger (N) Action Opening/Closing stroke (mm) L2L1 Max. operating frequency (c.p.m) Mass (g) Symbol Specifications/Description MHT External grip: 14 Internal grip : 16 External grip: 27 Internal grip : 30 External grip: 45 Internal grip : 53 External grip: 79 Internal grip : 90 -X4

Mechanically Jointed Rodless Cylinder/Cam Follower Guide Type

MY2C25G MY2C40G 14 Seal belt MY16-16AStroke MY25-16AStroke MY40-16AStroke 1 15 Dust seal band MY2H16-16BStroke MY2H25-16BStroke MY2H40-16BStroke 1 KA00309 KA00309 KA00320 14, 15 and 53 are not included in the seal kit.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53

MHK2

MHC Note) Width at opening (mm) L2 Model Bore size (mm) Width at closing (mm) L1 Effective gripping force per finger (N) Action Opening/Closing stroke (mm) L2L1 Max. operating frequency (c.p.m) Mass (g) Symbol Specifications/Description MHT External grip: 14 Internal grip : 16 External grip: 27 Internal grip : 30 External grip: 45 Internal grip : 53 External grip: 79 Internal grip : 90 -X4

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

SET SET button Use this button to set the value or the set mode. y DOWN button ( button) Use to change the mode or decrease the set value. 53 Digital Flow Switch Series PF2D For Deionized Water and Chemicals Functions/PF2D Refer to the Instruction Manual for information on setting and operating.

SMC Basic Pneumatics

Cyl.Dia Mass (kg) T 60" 45' 30' e u 0.01 po.2 p 0.01 It 0.2 p 0.01 p 0.2 tr 0,01 It 0.2 25 100 50 25 12.5 51.8 (87.2) 80 40 20 1 0 32 180 90 45 22.5 54.9 (s5.6) 47.8 53 78.4 39.2 4 2.2 '| .

Clamp Cylinder with Lock Series CLK1

12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 6 Hole: 10H8 102 + Stroke 55 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26 26 10

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

White] () OUT () Blue [Black] OUT () Blue [Black] DC () Blue [Black] Indicator light/Display method Proper Auto Switch Mounting Positions Solid state switches A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53

Compact Type Dual-Rod Cylinder Series CXSJ

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

Large Bore Compact Cylinder Series CQ2

Lead wire length Internal circuits Model 3m (~9ft) 0.5m (~1 1/2ft) 53 (1.9) 10 (0.35) D-Y59A, Y69A, Y7P D-Y59A, Y69A 50 (1.8) 9 (0.3) D-Y59B, Y69B, Y7PV Dimensions (mm) DC (+) Brown [Red] 1in = 25.4mm D-Y59A, Y59B D-Y7P Mounting screw M2.5 x 4l Main switch circuit OUT Black [White] Slotted-head set screw 2.5 3.4 Indicator light 6.2 6.2 5 DC () Blue [Black] 29 (500) (3000) (5000) D-Y7P (V)

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53