Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

For post-stoppage positioning and locking

W-R1-S W-R3-S Arm length A 109.5 mm 150.5 mm Position of clamp A Clamp block (Provided by customer) Position of fulcrum Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

CEx-OMQ0010

/B (CEU1CEU5 )0.1mm 20 8-1 A() 8-2 2 15 0.3MPa 30 21 M4x10 LOCK FREE 8-3 () 2 15 0.3MPa 30 [LOCK] 22 8-4 MPa () () mm 40 50 63 80 100 N 882 1370 2160 3430 5390 )15% 23 8-5 (kgf) (kgf) (mm/s) (mm/s) 24

IDX-OM-W093

8 A 8.1 8.2 A (10) 8.3 8.4 IDF60-20-A IDF60-30-A IDF70-20-A IDF70-30-A IDF80-20-A IDF80-30-A IDF90-20-A IDF90-30-A 50Hz 2.3 4 5.8 7.1 3/min(ANR) m 60Hz 3.2 4.8 6.5 7.9 10 1) ANR 65% 2) IDF60/70/80/90 Series 8-1 IDX-OM-W093 A 8.5 IDF60/70/80/90 Series 8-2 IDX-OM-W093 C 9 C 9.1 9.2 1) 2) IDF60/70/80/90 Series 9-1 IDX-OM-W093 A IDF60/70/80/90 Series 9-2 IDX-OM-W093 L 10 L L

SFOD-OMT0005CN

-57- 14 14.1 [5m ] (1) (2) LE CP A B-1 2 (L) A A-1 1 B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield (3) Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 S 9 B A-6 8 3 (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 5 6 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 [820m] LE-CP(1) (2) * * A B-1 2 (L) A A-1 1 B B-2 6 8 8m * B A-2 5 COM-A/COM B-3 3 A 10m *

ZSE30A(F)/ISE30A

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

TMH Nil Option ASD None With seal Electroless nickel plated S N AS Type 1 If more than one option is required, write option part numbers in the order of S, N. 2 M3, M5, and U10/32 are not available with seals. Elbow Universal 2 3 AS-FE KE AS-FG Control type Applicable tubing O.D.

Thermo-chiller

(CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

M, both valves return to their sealed position. 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.4 4.0 4.5 5.0 5.5 6.0 Adjustment nut rotations n 9 Series XMD, XYD Dimensions XMD/Angle type D C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98

LECA6_C

LE C A 6 N A (DC24V) (LE ) LESH16RAJ-50BS-R16N1D 6 64 LESH16RAJ-50 I/O N NPN DIN P PNP 1 1.5m D DIN 3 3m 5 5m <> NPNPNP LESH16RAJ-50 NPN NPN 7 - 2.3 1 I/O LEC-CN5-* PLC 1 3 DC24V CN5 CN3 CN4 2 1 () LE-CA-* CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 3 50 200 50 200 3 3 CN1 DC24V <> AWG20 (0.5mm 2) USB A-miniB type USB LEC-W2

SMC CORPORATION OF JAPAN

N = The Count value set by the user, range 0 32767. n = the actual count value, range 0 32767. This value can be set to a one time offset value. DirectSet Enter a value using the + and keys. Analog In An Analog input value from a System Input (A01, A02, A03, ... A08) FB Value An analog value contained in a Function Block (T, t, N, n, Direct set, etc.)

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Digital Gap Checker

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Series AK1000

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

PF-OMN0011_C

2 s 3 1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 -66No.PF-OMN0011CN-C PF3W30 0.4 V ()30 ms / 2 4 7 2 /6 11 ) 5 / 12 DC1224 V10 50 mA 5P 4P (e-con) IP40( IP65) 050 () 3585R.H.() AC1000V1 50M (DC500V ) CE UL(CSA)RoHS 50 g 100 g 1OFF (2 5 ) 5 100 (24 5 min100 500 min9.5 ) 290(7 s) 390(7 s) -67No.PF-OMN0011CN-C 0100 1 / -10110 1 3F.S. 7 s 2 5F.S. 1090 2 (ZS-

XL-OMY0002

10. 10-1. 2 2P5P6 16 XL-OMY0002 10-2 1 2 3 c b 1 S 2 O 4 M a S aa M 0.2MPa b S 0.3MPa c S 25,40,50,160 O 3 4 O O O O O O 17 XL-OMY0002 10-3. 1 2 3 2 3 O 4 1 M O M O O O O O O 4 5 O S M XLD-25 S XLD-40,50,160 S XLD-63,80,100 S S 25 4050160 O S 18 XL-OMY0002 6 7 c Nm c O XLD-25 0.360.1 S XLD-25 0.630.1 O S S 0.3MPa S c c O O O O O 8

AC Servo Motor Driver (Pulse input type/Positioning type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.