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Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

LIN-I 4 Y [] 2+(Y2-Y1) 2+(Z2-Z1) 2) =((X2-X1) (X2, Y2, Z2) X =((X2-X1)/) Y =((Y2-Y1)/) Z =((Z2-Z1)/) X (X1, Y1, Z1) Z 3.6 64 No.SFOD-OMT0009CN-B )100mm/s 1 100mm2 100mm No.1 50mm/s 1 100mm 2 50mm No.2 Step No. mm/s / 1 2 2 2 mm mm/s mm/s mm mm mm 1 LIN-A 100 100.00 1000 1000 0 0 0.5 2 LIN-A 100.00 0 0 0.5 1 3 4 1 LIN-I 50 100.00 1000 1000 0 0 0.5 2 LIN-I 50.00 0 0 0.5 2

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 LIN -A 100 100.00 1000 1000 0 0 0.5 2 LIN -A 100.00 0 0 0.5 1 3 4 1 LIN -I 50 100.00 1000 1000 0 0 0.5 2 LIN -I 50.00 0 0 0.5 2 3 4 () 2 50mm/s 50mm 2 25mm/s Step2 Step1 100mm 2 71mm/s 100mm 1 43mm/s 100mm/s (00) 100mm 1 71mm/s

An S coupler without check valve experiences leakage of fluid inside piping when it is uncoupled. Pay special attention in using fluid that can cause danger such as fluid of a high temperature and pressure. Additional use of a stop valve is recommended. 6. The S coupler is heated when used at a high temperature. Take precautions not to touch it since touching it can cause burns.

mm/s] 5) 50 35 [mm] 0.02 [mm] 10 5 2.5 12 6 3 [m/s 2] 6) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 (DC24V) A/B 800 //Z [V] DC2410% [W] 7) 40 86 [W] 8) 4/6 4/12 [W] 9) 59 96 10) [N] 20 39 78 78 157 294 [W] 11) 3.6 5 [V] DC2410% LEY 16 [ _ / R / L ]A LEY 25 [ _ / R / L ]A [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 (kg) 0.58 0.62 0.73 0.87

It is expressed as a percentage of the full-scale value of the reading according to the type of instrument. E ZSE ISE Ejector Simple piece of equipment to generate a vacuum. Positive air pressure is used to generate a vacuum. No moving parts. Analog output function A voltage or current output which has a value proportional to the measured pressure.

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box. 1) For an auto switch without a contact protection circuit, use a contact protection box when the wire length is 50m or longer.

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

ITALY/ ROMANIA SMC lIalia S.pA SINGAPORE SMC PneumallCs (S E A.) Pie. Ltd. FRANCE SOUTH AMERICA --VENEZUELA SMC Neumafica Venezuela SA SMC Pneumatique SA ARGENTINA SMC Argentina S,A, PHILIPPINES SWEDEN SMC Pneumaflcs Sweden AS SMC Pneumatics (Philippines), Inc. CHILE SMC Pneumalics (Chile) S.A. MALAYSIA SMC Pneumatics (S .EA.) Sdn. Bhd SWITZERLAND SMC Pnellmalik AG.

Step Data setting Note 2, 3) 06h / 10h Setting of a single or all Step Data parameter(s) Direct Operation Step Data reading 03h Reading of Direct Operation Step Data parameters. Direct Operation Step Data setting 06h / 10h Setting of a single or all Direct Operation Step Data parameter(s).

500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100

, select a model with 50 stroke or less.

Z Y69BZ Auto switches marked with a "" symbol are produced upon receipt of order.

100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02 (mm) 10 5 12 6 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 28 42 (W) 30 36 DC24V A/B 800 //Z (V) DC2410% (W) 4) 63 102 (W) 5) 4 /9 4 /9 (W) 6) 70 113 7) (N) 20 39 78 157 (W) 8) 3.6 5 (V) DC2410%

ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.