V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

CM2

24 V 100 V, 200 V DIN terminal Relay, PLC Diagnostic indication (2-color indication) B59W Grommet H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 2-wire IC circuit 5 V, 12 V Terminal conduit 12 V Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication

One-touch Fittings

Symbol Size Tubing connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1

PF-OMN0011_C

DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V E 15 V 1 k F420 mA 12 V 300 24 V 600 Max.28 V80 mA 1 V C 15 V 1 k D420 mA 12 V 300 24 V 600 -18No.PF-OMN0011CN-C NPN PF3W30G PNP PF3W30H DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V 30 ms Max.28 V80 mA 1 V 30 ms 2 PF3W30J/PF3W30K DC(+) DC(-) / J15 V 1 k K420 mA 12 V 300 24 V 600 -19No.PF-OMN0011CN-C

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.

MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

CRB2/CRBU2/CRB1

The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V), and D-S9P(V) 3.

EXxx-OMW0014CN

EX245-DY1 4M12(5 ,) (n+1) (n) FE/ 24 V(/) 0 V(/) 24 V(/) 0 V(/) FE . 8-3 EX245-DY1 55 No.EX-OMW0014CN-A 9.

EXxx-OMU0020CN

US1 LED . 6-6 US1 LED US1 OFF US1 OFF , (17 V ) US1 (17 V 20.4 V) ON US1 ON 21.6 V 6.4.6. US2 LED . 6-7 US2 LED US2 OFF US2 OFF , (17 V ) US2 (17 V 21.6 V) ON US2 ON 22.8 V 49 No.EX-OMU0020CN 6.5.

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

Magnet: None, Mounting: D (Double Clevis), Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 25mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 20mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: G (Rear Flange), Type: Standard, Bore Size: 16mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 50mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 40mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: G (Rear Flange), Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: G (Rear Flange), Type: Standard, Bore Size: 50mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: Built-in, Mounting: Front Flange, Type: Standard, Bore Size: 32mm, Port Thread Type: NPT 32-100 Bore, Stroke: 15mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Mounting Threads: -, Rod Type: -, Speed Control Type: -, Applicable Tubing: -, Suffix

Magnet: Built-in, Mounting: Rear Flange, Type: Standard, Bore Size: 20mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Mounting Threads: -, Rod Type: -, Speed Control Type: -, Applicable