Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Max. collision speed (mm/s) 1500 25 45 70 80 Max. operating frequency (cycle/min) 8.34 6.86 4.22 1.96 Extended Spring force (N) 20.50 15.98 6.86 4.22 Retracted Operating temperature range (C) 5 to 60 Standard Stroke Made to Order Specifications (For details, refer to page 8-31-1.)

MY1

88 7.5 M5 x 0.8 25 17 55.5 21.7 NW PA PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 16 20 07.5 11.5 56 60 40 50 94 100 3.5 4.5 153 191 9 10 48 45 11.0 14.5 2.5 5.5 15 18 14 12 10.0 12.5 102 110 13 14 54 58 180 220 30 32 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

NARM Series

56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81

3 Port Air Operated Valve Series SYJA300

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

ARM10/11

Stainless steel u VBA Blanking plate assembly i Square nut Steel o VE Dimensions VY1 ARM1006 08 For dimensions and accessories of One-touch fittings, please refer to page 14-4-45.

PF2D

ZSM PF2 IF Sensor Flow range Data 4 l/min 20 l/min 40 l/min 1.8 l/min 0.4 l/min 10 l/min 0.4 l/min 4 l/min PF2D504 4.5 l/min 0.25 l/min 1.8 l/min 20 l/min PF2D520 1.3 l/min 21 l/min 4 l/min 40 l/min PF2D540 2.5 l/min 45 l/min Rated flow rate range of sensor Set flow rate range of sensor 16-11-47

VXP21/22/23

VXP2270-12-1G VXP Model Port size Electrical entry X36 DIN terminal or class H coil not available. 17-3-45 4 The VX series will be revised shortly. Series VXP21/22/23 Normally Open (N.O.)

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 X 0.8 Body ported 3.6 (0.2) 43 45 SYJ522 N.O. VK SYJ514 N.C. Base mounted (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) Rc(PT)1/8 4.5 (0.25) SYJ524 N.O. VZ Note 1) At DC. When AC is used, add 1g.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(46) : AC : AC 2.10-28 VQZ100/200/300 Base Mounted Dimensions: VQZ200 Valve single unit Grommet (G): VQZ2l5(R)-lGl01 02 2-4.5 Mounting holes 4 32 19.2 Manual override Cover dia 1.6 Cross section 0.34mm2 R4 4 A 2 34 SY 15 SMC 3 R 1 P SYJ 40 300 70 VK (Lead wire) VZ VT VT 51 45 VP A port 22 13.5 16 9 9 VG M5 X 0.8 External pilot port (Only external pilot style (R)) 17 10.5 PE port (Rc(PT)1/

ZPT/ZPX

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

,,: ,.

K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

15.2 39.7 18.5 18.5 28.2 8 15.2 76 49.5 47 12.9 45.1 35.2 28.2 9.5 23 1.5 49.3 R1/4 19 54.8 AS331F-02-10ST AS231F-N02-11ST 3/8" 17.9 20.2 43.7 21 21 32.6 10 18.5 80 53.9 48 47.9 38.7 31 16.2 23 AS331F-02-12ST AS331F-N02-07ST 17 1/4" 13.2 44.9 22 34.4 12 20.9 82 55.7 73 46.9 38.7 25.6 12.9 20.6 AS331F-03-06ST AS331F-N02-09ST 23 NPT1/4 19 1.5 49.3 9.5 5/16" 15.2 18.5 38.5 17 25.2 6 12.8 78 45

Basic Type/Direct Mount Type

51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11 11

Solid State Auto Switches

50 45 63 45 80 45 100 Mountable models 50 Note) The operating range above indicates average values at room temperature including hysteresis (assuming approximately 30% dispersion).

CE

CC RB J D-X 20Data 10-12-11 11 Series CEP1 Dimensions: 12 Direct mounting, rod side tapped style: CEP1B12 Stroke 4 depth 4 (Positioning pin hole) Cable end + 0.05 + 0.02 17 40 4 depth 4 Without connector + 0.05 + 0.02 (Positioning pin hole) 4 45 4-M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5

Stroke Reading Cylinder and Counter

(Positioning pin hole) + 0.05 + 0.02 4 (Positioning pin hole) 27 18 6 5.5 38 4 x 4.5 50 652 CEP1 Series High Precision Stroke Reading Cylinder Non-rotating Piston Type Dimensions: 20 Direct mounting, rod side tapped type: CEP1B20 Stroke + 0.05 + 0.02 4 depth 4 (Positioning pin hole) CEP1 CEP1 CE1 Cable end CE2 18 40 + 0.05 + 0.02 4 depth 4 (Positioning pin hole) Without connector ML2B 4 45

•

. :.NO . of auto switch t).B'7 BB type 30.5 32 32 B t).G'K7 type Model With 2-swj\phes l With n switches With 1 swi1C~ ~~:::t Sane slrlct;e IDifferent surface Same $u.rfpce 50.5 43.5 ~ HS 38 2 A 0.5 2 D-B1 B8 type 1><>1K11ype 45+ 40(n2) 1 5+ 40 ('=<') 15 (n >2) 45 23.5 25 25 bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 (

CXS

67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5 2-M6 x 1.0 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke Bore size (mm) 10, 20 30, 40, 50 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 8-28-26 26 Series CXSJ Dual Rod Cylinder: Compact Type Proper Auto Switch

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

How to Order Compact yet provides a large flow capacity Dimensions (W x H x D)45 x 89.5 x 45 (Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications: VT/VO317V) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector

XLAQ/XLDQ

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. Bellows side Chamber Vacuum pump 476 XLAQ/XLDQ Series Specific Product Precautions 2 Be sure to read this before handling the products. Maintenance Caution 1.