3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low power consumption For vacuum/low power consumption Continuous duty type Rc 1/8 (With sub-plate) Without sub-plate Nil S None With surge voltage suppressor With

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(In comparison with control by speed controller) Applicable model: ASV310F, ASV410F, ASV510F C With spatter cover Body size K Hexagonal lock nut 1 2 3 4 5 M3 M5 1/8 1/4 3/8 Note) Option should be indicated in order of C and K. Available only for ASV310F, 410F and 510F. Seal Seal Symbol Applicable model Silencer and One-touch fittings are installed.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

0X: M5 x 0.8 0XY: M6 x 1.0 ISG 0X: M5 x 0.8 0XY: M6 x 1.0 ZSM Connector type ZSE3-0X-C 7 50.6 Vacuum supply port Vacuum pad connection port 20.5 RESET button DOWN button SET button Pneumatic circuit UP button Lead wire length 600 50 (3000) 10 58 PV 18 10.2 8 6.5 10.25 10 22.6 5.75 ZSE3-0X-C-D Vacuum pad connection port 2 x 3.3 Mounting hole Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1.0 0X

Manually Operated Integral Fitting Type/Threaded Type Series LVH

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

High Vacuum L Type Valve

(KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9

EXxx-OMY0004

Withstand voltage 500 VAC for 1 min. between FE and all accessible terminals to IEC 61131-2 Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) Atmospheric pressure Operation: 80 kPa to 108 kPa (under 2000 m) Storage: 66 kPa to 108 kPa (under 3500 m) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration

Precision Regulator Series IR1000/2000/3000

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.

Hydraulic Cylinders

H B (mm) C d D H B Part no.

Serial Transmission System Series EX250 Series EX500

Stations 1 station MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) 1 24VDC/60mA/IP65 8-point integrated type, M8 connector, PNP specifications C US TYPE1 R EX500-IE1 (PNP) 24VDC/60mA/IP65 TYPE1 EEX500-IB1-M6 1 set EX500-IE1 4 sets EX500-IE3 2 sets 24VDC/60mA/IP65 MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) MADE IN JAPAN C US TYPE1 8-point integrated type, M8 connector, NPN specifications R MADE

SMC Pneumatic Clean Series

D A 2 B 40 150 Y59B 21 C D A 2 B 40 150 Y59B Nil Built-in magnet Number of auto switches No 2 pcs. 1 pc.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Axial side mounting Lateral mounting Vertical mounting Axial side mounting Axial side mounting Model A C B D MHR2MHR3MDHR2MDHR3Lateral mounting A Lateral mounting A Lateral mounting B Vertical mounting C Vertical mounting D Vertical mounting C Vertical mounting D Auto switch installation groove Lateral mounting B MHR with auto switch MDHR With auto switch Vertical mounting Axial side mounting

Precautions 1

Rod End Nut (mm) Trunnion Nut (mm) Mounting Nut (mm) H Material: Carbon steel Material: Carbon steel Material: Carbon steel d d B D D C C C D H B H B d Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 B C D d H D d H C B d H B C D Part no. NT-02 NT-03 NT-04 Part no.

70pvpump

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.7 25 25 25 1 l/min(ANR) Inlet air temperature (C) VX3 Inlet air saturation temperature (C) Ambient temperature (C) VXA Dew point indicator purge air flow rate Port size (Nominal size B) 1/4, 3/8 1/8, 1/4 VN Weight (kg) (with bracket) 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90)

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

C B H B H Material: Carbon steel Material: Carbon steel Part no.

Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 11 11 11 C [dm3/(sbar)] 0.24 0.24 0.24 1 4/2 (P A/B) b VQZ 2 position metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 12 12 C [dm3/(sbar)] VQD 0.14 0.14 0.14 4/2 5/3 (A/B EA/EB) b 2.9 2.9 2.9 Cv 12 12 12 C [dm3/(sbar)] 0.33 0.33 0.33 1 4/2 ( RA/B)

AR20-B to AR60-B

Applicable Model Model AR10 Port size M5 AR 10 X406 M5 A 0.4 MPa setting w q Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.

Parallel Type Air Gripper

Screw torque (Nm) depth (mm) MHZJ2-10 M3 x 0.5 0.9 6 MHZJ2-16 M4x0.7 1.6 4.5 MHZJ2-20 M5 x 0.8 3.3 8 MHZJ2-25 M6x1 5.9 10 Max. tightening torque (Nm) Maximum screw-in Model No. Screw depth (mm) MHZJ2-10 M3 x 0.5 0.69 5 MHZJ2-16 M4x0.7 2.1 8 MHZJ2-20 M5 x 0.8 4.3 10 MHZJ2-25 M6x1 7.3 12 Max. tightening Model No.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.